A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

S.V. Pham; M. Dijkstra; H.A.G.M. van Wolferen; M. Pollnau; G.J.M. Krijnen; H.J.W.M. Hoekstra

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

S.V. Pham, M. Dijkstra, H.A.G.M. van Wolferen, M. Pollnau, G.J.M. Krijnen, H.J.W.M. Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, CLEO
Place of Publication	Washington, DC
Publisher	Optical Society of America
Pages	CThQ4
Number of pages	2
ISBN (Print)	978-1-55752-910-7
Publication status	Published - May 2011
Event	European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009: Explore Innovation. Build Applications. - Baltimore Convention Center, Munich, Germany Duration: 22 May 2011 → 26 May 2011

Conference

Conference	European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009
Abbreviated title	CLEO-Europe/EQEC 2011
Country/Territory	Germany
City	Munich
Period	22/05/11 → 26/05/11

Keywords

Integrated optics devices
IOMS-SNS: SENSORS
Optical microelectromechanical devices

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ArticleFinal published version, 872 KBLicence: Taverne

https://opg.optica.org/abstract.cfm?uri=CLEO_SI-2011-CThQ4

2 Conference contribution

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide
Pham, S. V., Dijkstra, M., van Wolferen, H. A. G. M., Pollnau, M., Krijnen, G. J. M. & Hoekstra, H. J. W. M., 1 Dec 2011, Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter. Ghent, Belgium: Ghent University, p. 61-64 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Open Access
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A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide
Pham, S. V., Dijkstra, M., van Wolferen, H. A. G. M., Pollnau, M., Krijnen, G. J. M. & Hoekstra, H. J. W. M., 2011, 2011 Conference on Lasers and Electro-Optics: Laser Science to Photonic Applications, CLEO 2011. IEEE, 5950509. (CLEO - Laser Science to Photonic Applications; vol. 2011).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
File

Cite this

@inproceedings{e24ab760b6ea40e9ba2623a51c3283aa,

title = "A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide",

abstract = "A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.",

keywords = "Integrated optics devices, IOMS-SNS: SENSORS, Optical microelectromechanical devices",

author = "S.V. Pham and M. Dijkstra and {van Wolferen}, H.A.G.M. and M. Pollnau and G.J.M. Krijnen and H.J.W.M. Hoekstra",

note = "eemcs-eprint-20118 ; European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO{\textregistered}/Europe-EQEC) 2009 : Explore Innovation. Build Applications., CLEO-Europe/EQEC 2011 ; Conference date: 22-05-2011 Through 26-05-2011",

year = "2011",

month = may,

language = "English",

isbn = "978-1-55752-910-7",

pages = "CThQ4",

booktitle = "Conference on Lasers and Electro-Optics, CLEO",

publisher = "Optical Society of America",

}

Pham, SV, Dijkstra, M, van Wolferen, HAGM, Pollnau, M, Krijnen, GJM & Hoekstra, HJWM 2011, A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. in Conference on Lasers and Electro-Optics, CLEO. Optical Society of America, Washington, DC, pp. CThQ4, European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009, Munich, Germany, 22/05/11. <https://opg.optica.org/abstract.cfm?uri=CLEO_SI-2011-CThQ4>

TY - GEN

T1 - A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

AU - Pham, S.V.

AU - Dijkstra, M.

AU - van Wolferen, H.A.G.M.

AU - Pollnau, M.

AU - Krijnen, G.J.M.

AU - Hoekstra, H.J.W.M.

N1 - eemcs-eprint-20118

PY - 2011/5

Y1 - 2011/5

N2 - A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

AB - A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

KW - Integrated optics devices

KW - IOMS-SNS: SENSORS

KW - Optical microelectromechanical devices

M3 - Conference contribution

SN - 978-1-55752-910-7

SP - CThQ4

BT - Conference on Lasers and Electro-Optics, CLEO

PB - Optical Society of America

CY - Washington, DC

T2 - European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009

Y2 - 22 May 2011 through 26 May 2011

ER -

A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

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Conference

Keywords

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