A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

P.V.S. Pham Van So; Mindert Dijkstra; Hendricus A.G.M. van Wolferen; Markus Pollnau; Gijsbertus J.M. Krijnen; Hugo Hoekstra

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

P.V.S. Pham Van So, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Markus Pollnau, Gijsbertus J.M. Krijnen, Hugo Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

Original language	Undefined
Title of host publication	Conference on Lasers and Electro-Optics, CLEO
Place of Publication	Washington, DC
Publisher	Optical Society of America
Pages	CThQ4
Number of pages	2
ISBN (Print)	978-1-55752-910-7
Publication status	Published - May 2011
Event	European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009 - Munich, Germany Duration: 22 May 2011 → 26 May 2011

Publication series

Name
Publisher	Optical Society of America

Conference

Conference	European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009
Abbreviated title	CLEO-Europe/EQEC 2011
Country	Germany
City	Munich
Period	22/05/11 → 26/05/11

Keywords

METIS-277622
IR-77377
EWI-20118
Integrated Optics devices
IOMS-SNS: SENSORS
Optical microelectromechanical devices

Access to Document

Cite this

Pham Van So, P. V. S., Dijkstra, M., van Wolferen, H. A. G. M., Pollnau, M., Krijnen, G. J. M., & Hoekstra, H. (2011). A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. In Conference on Lasers and Electro-Optics, CLEO (pp. CThQ4). Washington, DC: Optical Society of America.

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title = "A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide",

abstract = "A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.",

keywords = "METIS-277622, IR-77377, EWI-20118, Integrated Optics devices, IOMS-SNS: SENSORS, Optical microelectromechanical devices",

author = "{Pham Van So}, P.V.S. and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and Markus Pollnau and Krijnen, {Gijsbertus J.M.} and Hugo Hoekstra",

note = "eemcs-eprint-20118",

year = "2011",

month = "5",

language = "Undefined",

isbn = "978-1-55752-910-7",

publisher = "Optical Society of America",

pages = "CThQ4",

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Pham Van So, PVS, Dijkstra, M , van Wolferen, HAGM, Pollnau, M, Krijnen, GJM & Hoekstra, H 2011, A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. in Conference on Lasers and Electro-Optics, CLEO. Optical Society of America, Washington, DC, pp. CThQ4, European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009, Munich, Germany, 22/05/11.

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. / Pham Van So, P.V.S.; Dijkstra, Mindert ; van Wolferen, Hendricus A.G.M.; Pollnau, Markus; Krijnen, Gijsbertus J.M.; Hoekstra, Hugo.

Conference on Lasers and Electro-Optics, CLEO. Washington, DC : Optical Society of America, 2011. p. CThQ4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Pham Van So, P.V.S.

AU - Dijkstra, Mindert

AU - van Wolferen, Hendricus A.G.M.

AU - Pollnau, Markus

AU - Krijnen, Gijsbertus J.M.

AU - Hoekstra, Hugo

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AB - A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

KW - METIS-277622

KW - IR-77377

KW - EWI-20118

KW - Integrated Optics devices

KW - IOMS-SNS: SENSORS

KW - Optical microelectromechanical devices

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BT - Conference on Lasers and Electro-Optics, CLEO

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