A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

S.V. Pham, M. Dijkstra, H.A.G.M. van Wolferen, M. Pollnau, G.J.M. Krijnen, H.J.W.M. Hoekstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.
    Original languageEnglish
    Title of host publicationConference on Lasers and Electro-Optics, CLEO
    Place of PublicationWashington, DC
    PublisherOptical Society of America
    PagesCThQ4
    Number of pages2
    ISBN (Print)978-1-55752-910-7
    Publication statusPublished - May 2011
    EventEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009: Explore Innovation. Build Applications. - Baltimore Convention Center, Munich, Germany
    Duration: 22 May 201126 May 2011

    Conference

    ConferenceEuropean Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009
    Abbreviated titleCLEO-Europe/EQEC 2011
    Country/TerritoryGermany
    CityMunich
    Period22/05/1126/05/11

    Keywords

    • Integrated optics devices
    • IOMS-SNS: SENSORS
    • Optical microelectromechanical devices

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