@inproceedings{e24ab760b6ea40e9ba2623a51c3283aa,
title = "A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide",
abstract = "A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.",
keywords = "METIS-277622, IR-77377, EWI-20118, Integrated Optics devices, IOMS-SNS: SENSORS, Optical microelectromechanical devices",
author = "{Pham Van So}, P.V.S. and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and Markus Pollnau and Krijnen, {Gijsbertus J.M.} and Hugo Hoekstra",
note = "eemcs-eprint-20118 ; null ; Conference date: 22-05-2011 Through 26-05-2011",
year = "2011",
month = may,
language = "Undefined",
isbn = "978-1-55752-910-7",
publisher = "Optical Society of America",
pages = "CThQ4",
booktitle = "Conference on Lasers and Electro-Optics, CLEO",
address = "United States",
}