A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.
|Publisher||Optical Society of America|
|Conference||European Conference on Lasers and Electro-Optics and the XIIth European Quantum Electronics Conference (CLEO®/Europe-EQEC) 2009|
|Abbreviated title||CLEO-Europe/EQEC 2011|
|Period||22/05/11 → 26/05/11|
- Integrated Optics devices
- IOMS-SNS: SENSORS
- Optical microelectromechanical devices