A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

S.V. Pham*, M. Dijkstra, H.A.G.M. van Wolferen, M. Pollnau, G.J.M. Krijnen, H.J.W.M. Hoekstra

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Downloads (Pure)

    Abstract

    A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

    Original languageEnglish
    Title of host publication2011 Conference on Lasers and Electro-Optics
    Subtitle of host publicationLaser Science to Photonic Applications, CLEO 2011
    PublisherIEEE
    ISBN (Electronic)978-1-55752-911-4
    ISBN (Print)978-1-4577-1223-4, 978-1-55752-910-7 (CD)
    Publication statusPublished - 2011
    EventConference on Lasers and Electro-Optics, CLEO 2011 - Baltimore, United States
    Duration: 1 May 20116 May 2011

    Publication series

    NameCLEO - Laser Science to Photonic Applications
    PublisherIEEE
    Volume2011
    ISSN (Print)2160-8989

    Conference

    ConferenceConference on Lasers and Electro-Optics, CLEO 2011
    Abbreviated titleCLEO
    Country/TerritoryUnited States
    CityBaltimore
    Period1/05/116/05/11

    Keywords

    • 2023 OA procedure

    Fingerprint

    Dive into the research topics of 'A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide'. Together they form a unique fingerprint.

    Cite this