A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

S.V. Pham; M. Dijkstra; H.A.G.M. van Wolferen; M. Pollnau; G.J.M. Krijnen; H.J.W.M. Hoekstra

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

S.V. Pham^*
, M. Dijkstra
, H.A.G.M. van Wolferen
, M. Pollnau
, G.J.M. Krijnen
, H.J.W.M. Hoekstra

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si₃N₄ grated waveguide.

Original language	English
Title of host publication	2011 Conference on Lasers and Electro-Optics
Subtitle of host publication	Laser Science to Photonic Applications, CLEO 2011
Publisher	IEEE
ISBN (Electronic)	978-1-55752-911-4
ISBN (Print)	978-1-4577-1223-4, 978-1-55752-910-7 (CD)
Publication status	Published - 2011
Event	Conference on Lasers and Electro-Optics, CLEO 2011 - Baltimore, United States Duration: 1 May 2011 → 6 May 2011

Publication series

Name	CLEO - Laser Science to Photonic Applications
Publisher	IEEE
Volume	2011
ISSN (Print)	2160-8989

Conference

Conference	Conference on Lasers and Electro-Optics, CLEO 2011
Abbreviated title	CLEO
Country/Territory	United States
City	Baltimore
Period	1/05/11 → 6/05/11

Keywords

2023 OA procedure

Access to Document

ArticleFinal published version, 927 KBLicence: Taverne

https://ieeexplore.ieee.org/document/5950509

Cite this

Pham, S. V., Dijkstra, M., van Wolferen, H. A. G. M., Pollnau, M., Krijnen, G. J. M., & Hoekstra, H. J. W. M. (2011). A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. In 2011 Conference on Lasers and Electro-Optics: Laser Science to Photonic Applications, CLEO 2011 Article 5950509 (CLEO - Laser Science to Photonic Applications; Vol. 2011). IEEE. https://ieeexplore.ieee.org/document/5950509

@inproceedings{aae00c610a244e8b8badc7177af594c8,

title = "A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide",

abstract = "A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.",

keywords = "2023 OA procedure",

author = "S.V. Pham and M. Dijkstra and \{van Wolferen\}, H.A.G.M. and M. Pollnau and G.J.M. Krijnen and H.J.W.M. Hoekstra",

year = "2011",

language = "English",

isbn = "978-1-4577-1223-4",

series = "CLEO - Laser Science to Photonic Applications",

publisher = "IEEE",

booktitle = "2011 Conference on Lasers and Electro-Optics",

address = "United States",

note = "Conference on Lasers and Electro-Optics, CLEO 2011, CLEO ; Conference date: 01-05-2011 Through 06-05-2011",

}

Pham, SV, Dijkstra, M, van Wolferen, HAGM, Pollnau, M, Krijnen, GJM & Hoekstra, HJWM 2011, A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. in 2011 Conference on Lasers and Electro-Optics: Laser Science to Photonic Applications, CLEO 2011., 5950509, CLEO - Laser Science to Photonic Applications, vol. 2011, IEEE, Conference on Lasers and Electro-Optics, CLEO 2011, Baltimore, Maryland, United States, 1/05/11. <https://ieeexplore.ieee.org/document/5950509>

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. / Pham, S.V.; Dijkstra, M.; van Wolferen, H.A.G.M. et al.
2011 Conference on Lasers and Electro-Optics: Laser Science to Photonic Applications, CLEO 2011. IEEE, 2011. 5950509 (CLEO - Laser Science to Photonic Applications; Vol. 2011).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

AU - Pham, S.V.

AU - Dijkstra, M.

AU - van Wolferen, H.A.G.M.

AU - Pollnau, M.

AU - Krijnen, G.J.M.

AU - Hoekstra, H.J.W.M.

PY - 2011

Y1 - 2011

N2 - A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

AB - A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.

KW - 2023 OA procedure

UR - https://www.scopus.com/pages/publications/84893580053

M3 - Conference contribution

SN - 978-1-4577-1223-4

SN - 978-1-55752-910-7 (CD)

T3 - CLEO - Laser Science to Photonic Applications

BT - 2011 Conference on Lasers and Electro-Optics

PB - IEEE

T2 - Conference on Lasers and Electro-Optics, CLEO 2011

Y2 - 1 May 2011 through 6 May 2011

ER -

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

Abstract

Publication series

Conference

Keywords

Access to Document

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A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

Cite this