A novel method for the fabrication of freestanding PZT features on substrates

Joost G. van Bennekom; J.G. van Bennekom; Aloysius J.A. Winnubst; W. Nijdam; Matthias Wessling; Rob G.H. Lammertink

doi:10.1016/j.jeurceramsoc.2009.06.019

A novel method for the fabrication of freestanding PZT features on substrates

Joost G. van Bennekom, J.G. van Bennekom, Aloysius J.A. Winnubst, W. Nijdam, Matthias Wessling, Rob G.H. Lammertink

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Abstract

A simple and cheap micromoulding fabrication route was developed to prepare freestanding piezo active features. Dimensions as small as 200 μm by 200 μm and 40 μm high were successfully fabricated via a replication technique. The lead zirconate titanate features were thoroughly characterized using SEM, EDX and XRD analysis. The properties of the features were influenced by several factors like the type of substrate, sintering temperature and sintering atmosphere. Features prepared on alumina substrates and sintered in lead atmosphere displayed a structure with reproducible dimensions. Next to that they were low in porosity and had a comparable composition with respect to the starting powder. The remanent polarization of the lead zirconate film was 12.3 μC/cm2 and the coercive field was 8.7 kV/cm.

Original language	Undefined
Pages (from-to)	3227-3233
Journal	Journal of the European Ceramic Society
Volume	29
Issue number	15
DOIs	https://doi.org/10.1016/j.jeurceramsoc.2009.06.019
Publication status	Published - 2009

Keywords

METIS-258209
IR-71505

Access to Document

10.1016/j.jeurceramsoc.2009.06.019

Cite this

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title = "A novel method for the fabrication of freestanding PZT features on substrates",

abstract = "A simple and cheap micromoulding fabrication route was developed to prepare freestanding piezo active features. Dimensions as small as 200 μm by 200 μm and 40 μm high were successfully fabricated via a replication technique. The lead zirconate titanate features were thoroughly characterized using SEM, EDX and XRD analysis. The properties of the features were influenced by several factors like the type of substrate, sintering temperature and sintering atmosphere. Features prepared on alumina substrates and sintered in lead atmosphere displayed a structure with reproducible dimensions. Next to that they were low in porosity and had a comparable composition with respect to the starting powder. The remanent polarization of the lead zirconate film was 12.3 μC/cm2 and the coercive field was 8.7 kV/cm.",

keywords = "METIS-258209, IR-71505",

author = "{van Bennekom}, {Joost G.} and {van Bennekom}, J.G. and Winnubst, {Aloysius J.A.} and W. Nijdam and Matthias Wessling and Lammertink, {Rob G.H.}",

year = "2009",

doi = "10.1016/j.jeurceramsoc.2009.06.019",

language = "Undefined",

volume = "29",

pages = "3227--3233",

journal = "Journal of the European Ceramic Society",

issn = "0955-2219",

publisher = "Elsevier B.V.",

number = "15",

}

TY - JOUR

T1 - A novel method for the fabrication of freestanding PZT features on substrates

AU - van Bennekom, Joost G.

AU - van Bennekom, J.G.

AU - Winnubst, Aloysius J.A.

AU - Nijdam, W.

AU - Wessling, Matthias

AU - Lammertink, Rob G.H.

PY - 2009

Y1 - 2009

N2 - A simple and cheap micromoulding fabrication route was developed to prepare freestanding piezo active features. Dimensions as small as 200 μm by 200 μm and 40 μm high were successfully fabricated via a replication technique. The lead zirconate titanate features were thoroughly characterized using SEM, EDX and XRD analysis. The properties of the features were influenced by several factors like the type of substrate, sintering temperature and sintering atmosphere. Features prepared on alumina substrates and sintered in lead atmosphere displayed a structure with reproducible dimensions. Next to that they were low in porosity and had a comparable composition with respect to the starting powder. The remanent polarization of the lead zirconate film was 12.3 μC/cm2 and the coercive field was 8.7 kV/cm.

AB - A simple and cheap micromoulding fabrication route was developed to prepare freestanding piezo active features. Dimensions as small as 200 μm by 200 μm and 40 μm high were successfully fabricated via a replication technique. The lead zirconate titanate features were thoroughly characterized using SEM, EDX and XRD analysis. The properties of the features were influenced by several factors like the type of substrate, sintering temperature and sintering atmosphere. Features prepared on alumina substrates and sintered in lead atmosphere displayed a structure with reproducible dimensions. Next to that they were low in porosity and had a comparable composition with respect to the starting powder. The remanent polarization of the lead zirconate film was 12.3 μC/cm2 and the coercive field was 8.7 kV/cm.

KW - METIS-258209

KW - IR-71505

U2 - 10.1016/j.jeurceramsoc.2009.06.019

DO - 10.1016/j.jeurceramsoc.2009.06.019

M3 - Article

SN - 0955-2219

VL - 29

SP - 3227

EP - 3233

JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

IS - 15

ER -