A novel method for the fabrication of freestanding PZT features on substrates

Joost G. van Bennekom, J.G. van Bennekom, Aloysius J.A. Winnubst, W. Nijdam, Matthias Wessling, Rob G.H. Lammertink

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A simple and cheap micromoulding fabrication route was developed to prepare freestanding piezo active features. Dimensions as small as 200 μm by 200 μm and 40 μm high were successfully fabricated via a replication technique. The lead zirconate titanate features were thoroughly characterized using SEM, EDX and XRD analysis. The properties of the features were influenced by several factors like the type of substrate, sintering temperature and sintering atmosphere. Features prepared on alumina substrates and sintered in lead atmosphere displayed a structure with reproducible dimensions. Next to that they were low in porosity and had a comparable composition with respect to the starting powder. The remanent polarization of the lead zirconate film was 12.3 μC/cm2 and the coercive field was 8.7 kV/cm.
Original languageUndefined
Pages (from-to)3227-3233
JournalJournal of the European Ceramic Society
Issue number15
Publication statusPublished - 2009


  • METIS-258209
  • IR-71505

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