A novel micromechanical flow controller

M.W. van Toor; Theodorus S.J. Lammerink; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; D.J. Monsma

doi:10.1088/0960-1317/7/3/023

A novel micromechanical flow controller

M.W. van Toor, Theodorus S.J. Lammerink, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, D.J. Monsma

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

A new concept for a micromechanical flow regulator is presented. Regulation of the flow is achieved using variation of channel length instead of channel diameter. Several design concepts together with their application in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tested.

Original language	English
Pages (from-to)	165-169
Number of pages	5
Journal	Journal of micromechanics and microengineering
Volume	7
DOIs	https://doi.org/10.1088/0960-1317/7/3/023
Publication status	Published - Sept 1997

Keywords

METIS-111506
EWI-13489
IR-14239

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10.1088/0960-1317/7/3/023

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title = "A novel micromechanical flow controller",

abstract = "A new concept for a micromechanical flow regulator is presented. Regulation of the flow is achieved using variation of channel length instead of channel diameter. Several design concepts together with their application in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tested.",

keywords = "METIS-111506, EWI-13489, IR-14239",

author = "{van Toor}, M.W. and Lammerink, {Theodorus S.J.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and D.J. Monsma",

year = "1997",

month = sep,

doi = "10.1088/0960-1317/7/3/023",

language = "English",

volume = "7",

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journal = "Journal of micromechanics and microengineering",

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AU - van Toor, M.W.

AU - Lammerink, Theodorus S.J.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - Monsma, D.J.

PY - 1997/9

Y1 - 1997/9

N2 - A new concept for a micromechanical flow regulator is presented. Regulation of the flow is achieved using variation of channel length instead of channel diameter. Several design concepts together with their application in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tested.

AB - A new concept for a micromechanical flow regulator is presented. Regulation of the flow is achieved using variation of channel length instead of channel diameter. Several design concepts together with their application in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tested.

KW - METIS-111506

KW - EWI-13489

KW - IR-14239

U2 - 10.1088/0960-1317/7/3/023

DO - 10.1088/0960-1317/7/3/023

M3 - Article

SN - 0960-1317

VL - 7

SP - 165

EP - 169

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

ER -

A novel micromechanical flow controller

Abstract

Keywords

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