A novel micromechanical flow controller

M.W. van Toor, Theodorus S.J. Lammerink, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, D.J. Monsma

    Research output: Contribution to journalArticleAcademicpeer-review

    4 Citations (Scopus)
    66 Downloads (Pure)

    Abstract

    A new concept for a micromechanical flow regulator is presented. Regulation of the flow is achieved using variation of channel length instead of channel diameter. Several design concepts together with their application in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tested.
    Original languageEnglish
    Pages (from-to)165-169
    Number of pages5
    JournalJournal of micromechanics and microengineering
    Volume7
    DOIs
    Publication statusPublished - Sep 1997

    Keywords

    • METIS-111506
    • EWI-13489
    • IR-14239

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