A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides

G. Altena, Mindert Dijkstra, G. van Elzakker, G.C.F. Venhorst, Paul Lambeck, Hugo Hoekstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter
    EditorsR.M de Ridder, G Altena, D.H. Geuzebroek, R Dekker
    Place of PublicationEnschede
    PublisherIEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems
    Pages25-28
    Number of pages4
    ISBN (Print)90-365-1990-X
    Publication statusPublished - 20 Nov 2003
    Event8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 - University of Twente, Enschede, Netherlands
    Duration: 20 Nov 200321 Nov 2003
    Conference number: 8

    Conference

    Conference8th Annual Symposium IEEE/LEOS Benelux Chapter 2003
    CountryNetherlands
    CityEnschede
    Period20/11/0321/11/03

    Keywords

    • METIS-214365

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