A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides

G. Altena; Mindert Dijkstra; G.  van Elzakker; G.C.F. Venhorst; Paul Lambeck; Hugo Hoekstra

A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides

G. Altena, Mindert Dijkstra, G. van Elzakker, G.C.F. Venhorst, Paul Lambeck, Hugo Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter
Editors	R.M de Ridder, G Altena, D.H. Geuzebroek, R Dekker
Place of Publication	Enschede
Publisher	IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems
Pages	25-28
Number of pages	4
ISBN (Print)	90-365-1990-X
Publication status	Published - 20 Nov 2003
Event	8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 - University of Twente, Enschede, Netherlands Duration: 20 Nov 2003 → 21 Nov 2003 Conference number: 8

Conference

Conference	8th Annual Symposium IEEE/LEOS Benelux Chapter 2003
Country/Territory	Netherlands
City	Enschede
Period	20/11/03 → 21/11/03

Keywords

METIS-214365

Cite this

Altena, G., Dijkstra, M., Elzakker, G. V., Venhorst, G. C. F., Lambeck, P., & Hoekstra, H. (2003). A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides. In R. M. de Ridder, G. Altena, D. H. Geuzebroek, & R. Dekker (Eds.), Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter (pp. 25-28). IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems.

Altena, G. ; Dijkstra, Mindert ; Elzakker, G. van ; Venhorst, G.C.F. ; Lambeck, Paul ; Hoekstra, Hugo. / A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides. Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter. editor / R.M de Ridder ; G Altena ; D.H. Geuzebroek ; R Dekker. Enschede : IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems, 2003. pp. 25-28

@inproceedings{a3763e276fd640ffa62e3cf4356e6918,

title = "A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides",

keywords = "METIS-214365",

author = "G. Altena and Mindert Dijkstra and Elzakker, {G. van} and G.C.F. Venhorst and Paul Lambeck and Hugo Hoekstra",

note = "invited ; null ; Conference date: 20-11-2003 Through 21-11-2003",

year = "2003",

month = nov,

day = "20",

language = "Undefined",

isbn = "90-365-1990-X",

pages = "25--28",

editor = "{de Ridder}, R.M and G Altena and D.H. Geuzebroek and R Dekker",

booktitle = "Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter",

publisher = "IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems",

}

Altena, G, Dijkstra, M, Elzakker, GV, Venhorst, GCF, Lambeck, P & Hoekstra, H 2003, A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides. in RM de Ridder, G Altena, DH Geuzebroek & R Dekker (eds), Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter. IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems, Enschede, pp. 25-28, 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003, Enschede, Netherlands, 20/11/03.

A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides. / Altena, G.; Dijkstra, Mindert; Elzakker, G. van; Venhorst, G.C.F.; Lambeck, Paul; Hoekstra, Hugo.

Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter. ed. / R.M de Ridder; G Altena; D.H. Geuzebroek; R Dekker. Enschede : IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems, 2003. p. 25-28.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides

AU - Altena, G.

AU - Dijkstra, Mindert

AU - Elzakker, G. van

AU - Venhorst, G.C.F.

AU - Lambeck, Paul

AU - Hoekstra, Hugo

N1 - Conference code: 8

PY - 2003/11/20

Y1 - 2003/11/20

KW - METIS-214365

M3 - Conference contribution

SN - 90-365-1990-X

SP - 25

EP - 28

BT - Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter

A2 - de Ridder, R.M

A2 - Altena, G

A2 - Geuzebroek, D.H.

A2 - Dekker, R

PB - IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems

CY - Enschede

Y2 - 20 November 2003 through 21 November 2003

ER -

Altena G, Dijkstra M, Elzakker GV, Venhorst GCF, Lambeck P, Hoekstra H. A novel MOEMS device: Detection of MEMS movements using free-standing SI3N4 suspended optical waveguides. In de Ridder RM, Altena G, Geuzebroek DH, Dekker R, editors, Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter. Enschede: IEEE LEOS Benelux, p/a Un. Twente, Int. Optical MicroSystems. 2003. p. 25-28