A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

G. Altena; M. Dijkstra; G.  van Elzakker; G.C.F. Venhorst; P.V. Lambeck; H.J.W.M. Hoekstra

A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

G. Altena
, M. Dijkstra
, G. van Elzakker
, G.C.F. Venhorst
, P.V. Lambeck
, H.J.W.M. Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

21 Citations (Scopus)

75 Downloads (Pure)

Abstract

We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.

Original language	English
Title of host publication	Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003
Editors	R.M de Ridder, G Altena, D.H. Geuzebroek, R Dekker
Place of Publication	Enschede
Publisher	IEEE
Pages	25-28
Number of pages	4
ISBN (Print)	90-365-1990-X
Publication status	Published - 2003
Event	8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 - University of Twente, Enschede, Netherlands Duration: 20 Nov 2003 → 21 Nov 2003 Conference number: 8

Conference

Conference	8th Annual Symposium IEEE/LEOS Benelux Chapter 2003
Country/Territory	Netherlands
City	Enschede
Period	20/11/03 → 21/11/03

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Altena, G., Dijkstra, M., Elzakker, G. V., Venhorst, G. C. F., Lambeck, P. V., & Hoekstra, H. J. W. M. (2003). A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. In R. M. de Ridder, G. Altena, D. H. Geuzebroek, & R. Dekker (Eds.), Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 (pp. 25-28). IEEE.

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title = "A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides",

abstract = "We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.",

author = "G. Altena and M. Dijkstra and Elzakker, \{G. van\} and G.C.F. Venhorst and P.V. Lambeck and H.J.W.M. Hoekstra",

year = "2003",

language = "English",

isbn = "90-365-1990-X",

pages = "25--28",

editor = "\{de Ridder\}, R.M and G Altena and D.H. Geuzebroek and R Dekker",

booktitle = "Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003",

publisher = "IEEE",

address = "United States",

note = "8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 ; Conference date: 20-11-2003 Through 21-11-2003",

}

Altena, G, Dijkstra, M, Elzakker, GV, Venhorst, GCF, Lambeck, PV & Hoekstra, HJWM 2003, A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. in RM de Ridder, G Altena, DH Geuzebroek & R Dekker (eds), Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003. IEEE, Enschede, pp. 25-28, 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003, Enschede, Netherlands, 20/11/03.

A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. / Altena, G.; Dijkstra, M.; Elzakker, G. van et al.
Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003. ed. / R.M de Ridder; G Altena; D.H. Geuzebroek; R Dekker. Enschede: IEEE, 2003. p. 25-28.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

AU - Altena, G.

AU - Dijkstra, M.

AU - Elzakker, G. van

AU - Venhorst, G.C.F.

AU - Lambeck, P.V.

AU - Hoekstra, H.J.W.M.

N1 - Conference code: 8

PY - 2003

Y1 - 2003

N2 - We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.

AB - We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.

M3 - Conference contribution

SN - 90-365-1990-X

SP - 25

EP - 28

BT - Proceedings of the 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003

A2 - de Ridder, R.M

A2 - Altena, G

A2 - Geuzebroek, D.H.

A2 - Dekker, R

PB - IEEE

CY - Enschede

T2 - 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003

Y2 - 20 November 2003 through 21 November 2003

ER -

A Novel MOEMS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

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