Abstract
We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.
Original language | English |
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Pages | 25-28 |
Publication status | Published - 2003 |
Event | 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 - University of Twente, Enschede, Netherlands Duration: 20 Nov 2003 → 21 Nov 2003 Conference number: 8 |
Conference
Conference | 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 |
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Country/Territory | Netherlands |
City | Enschede |
Period | 20/11/03 → 21/11/03 |
Keywords
- IR-58163