A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

R.M. de Ridder (Editor), G. Altena (Editor), Mindert Dijkstra, R. Dekker (Editor), G. van Elzakker, G.C.F. Venhorst, Hugo Hoekstra, Paul Lambeck

    Research output: Contribution to conference › Paper

    17 Citations (Scopus)
    13 Downloads (Pure)

    Abstract

    We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.
    Original languageEnglish
    Pages25-28
    Publication statusPublished - 2003
    Event8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 - University of Twente, Enschede, Netherlands
    Duration: 20 Nov 2003 → 21 Nov 2003
    Conference number: 8

    Conference

    Conference8th Annual Symposium IEEE/LEOS Benelux Chapter 2003
    CountryNetherlands
    CityEnschede
    Period20/11/03 → 21/11/03

    Keywords

    • IR-58163

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      de Ridder, R. M. (Ed.), Altena, G. (Ed.), Dijkstra, M., Dekker, R. (Ed.), van Elzakker, G., Venhorst, G. C. F., ... Lambeck, P. (2003). A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. 25-28. Paper presented at 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003, Enschede, Netherlands.