A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

R.M. de Ridder; G. Altena; Mindert Dijkstra; R. Dekker; G. van Elzakker; G.C.F. Venhorst; Hugo Hoekstra; Paul Lambeck

A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

R.M. de Ridder (Editor), G. Altena (Editor), Mindert Dijkstra, R. Dekker (Editor), G. van Elzakker, G.C.F. Venhorst, Hugo Hoekstra, Paul Lambeck

Research output: Contribution to conference › Paper › Academic

18 Citations (Scopus)

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Abstract

We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.

Original language	English
Pages	25-28
Publication status	Published - 2003
Event	8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 - University of Twente, Enschede, Netherlands Duration: 20 Nov 2003 → 21 Nov 2003 Conference number: 8

Conference

Conference	8th Annual Symposium IEEE/LEOS Benelux Chapter 2003
Country/Territory	Netherlands
City	Enschede
Period	20/11/03 → 21/11/03

Keywords

IR-58163

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Altena03novelFinal published version, 747 KB

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title = "A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides",

abstract = "We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.",

keywords = "IR-58163",

author = "{de Ridder}, R.M. and G. Altena and Mindert Dijkstra and R. Dekker and {van Elzakker}, G. and G.C.F. Venhorst and Hugo Hoekstra and Paul Lambeck",

year = "2003",

language = "English",

pages = "25--28",

note = "8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 ; Conference date: 20-11-2003 Through 21-11-2003",

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A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. / de Ridder, R.M. (Editor); Altena, G. (Editor); Dijkstra, Mindert; Dekker, R. (Editor); van Elzakker, G.; Venhorst, G.C.F.; Hoekstra, Hugo; Lambeck, Paul.

2003. 25-28 Paper presented at 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003, Enschede, Netherlands.

Research output: Contribution to conference › Paper › Academic

TY - CONF

T1 - A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

AU - Dijkstra, Mindert

AU - van Elzakker, G.

AU - Venhorst, G.C.F.

AU - Hoekstra, Hugo

AU - Lambeck, Paul

A2 - de Ridder, R.M.

A2 - Altena, G.

A2 - Dekker, R.

N1 - Conference code: 8

PY - 2003

Y1 - 2003

N2 - We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.

AB - We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.

KW - IR-58163

M3 - Paper

SP - 25

EP - 28

T2 - 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003

Y2 - 20 November 2003 through 21 November 2003

ER -

A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

Abstract

Conference

Keywords

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