We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.
|Publication status||Published - 2003|
|Event||8th Annual Symposium IEEE/LEOS Benelux Chapter 2003 - University of Twente, Enschede, Netherlands|
Duration: 20 Nov 2003 → 21 Nov 2003
Conference number: 8
|Conference||8th Annual Symposium IEEE/LEOS Benelux Chapter 2003|
|Period||20/11/03 → 21/11/03|
de Ridder, R. M. (Ed.), Altena, G. (Ed.), Dijkstra, M., Dekker, R. (Ed.), van Elzakker, G., Venhorst, G. C. F., ... Lambeck, P. (2003). A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. 25-28. Paper presented at 8th Annual Symposium IEEE/LEOS Benelux Chapter 2003, Enschede, Netherlands.