A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides

R.M. de Ridder (Editor), G. Altena (Editor), Mindert Dijkstra, R. Dekker (Editor), G. van Elzakker, G.C.F. Venhorst, Hugo Hoekstra, Paul Lambeck

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    Physics & Astronomy