A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

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Abstract

Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ∼1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer-with the desired final thickness of the KY(WO4)2 waveguide core-is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.

Original languageEnglish
Title of host publicationIntegrated Optics: Devices, Materials, and Technologies XXII
Subtitle of host publicationDevices, Materials, and Technologies XXII
EditorsSonia M. García-Blanco, Pavel Cheben
PublisherSPIE
Pages27
Volume10535
ISBN (Electronic)9781510615557
ISBN (Print)9781510615557
DOIs
Publication statusPublished - 1 Jan 2018
EventSPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2018 - The Moscone Center, San Francisco, United States
Duration: 28 Jan 20182 Feb 2018

Publication series

NameINTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII
ISSN (Print)0277-786X

Conference

ConferenceSPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2018
Abbreviated titleOPTO
CountryUnited States
CitySan Francisco
Period28/01/182/02/18

Fingerprint

Yttrium
tungstates
Polishing
Potassium
yttrium
polishing
Silicon Dioxide
potassium
Silicon
Silica
silicon dioxide
Waveguide
Lapping
Waveguides
Substrate
SiO2
waveguides
Substrates
chips
Flip chip

Keywords

  • Bonding
  • Heterogeneous integration
  • Integrated optics
  • Lapping
  • Polishing.
  • Potassium double tungstate
  • heterogeneous integration
  • lapping
  • thinning
  • bonding
  • polishing
  • high-contrast waveguide
  • integrated optics
  • potassium double tungstate

Cite this

Van Emmerik, C. I., Martinussen, S. M., Mu, J., Dijkstra, M., Kooijman, R., & García-Blanco, S. M. (2018). A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide. In S. M. García-Blanco, & P. Cheben (Eds.), Integrated Optics: Devices, Materials, and Technologies XXII: Devices, Materials, and Technologies XXII (Vol. 10535, pp. 27). [105350U] (INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII). SPIE. https://doi.org/10.1117/12.2289955
Van Emmerik, Carlijn I. ; Martinussen, Simen M. ; Mu, Jinfeng ; Dijkstra, Meindert ; Kooijman, Roy ; García-Blanco, Sonia M. / A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide. Integrated Optics: Devices, Materials, and Technologies XXII: Devices, Materials, and Technologies XXII. editor / Sonia M. García-Blanco ; Pavel Cheben. Vol. 10535 SPIE, 2018. pp. 27 (INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII).
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abstract = "Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ∼1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer-with the desired final thickness of the KY(WO4)2 waveguide core-is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.",
keywords = "Bonding, Heterogeneous integration, Integrated optics, Lapping, Polishing., Potassium double tungstate, heterogeneous integration, lapping, thinning, bonding, polishing, high-contrast waveguide, integrated optics, potassium double tungstate",
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Van Emmerik, CI, Martinussen, SM, Mu, J, Dijkstra, M, Kooijman, R & García-Blanco, SM 2018, A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide. in SM García-Blanco & P Cheben (eds), Integrated Optics: Devices, Materials, and Technologies XXII: Devices, Materials, and Technologies XXII. vol. 10535, 105350U, INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII, SPIE, pp. 27, SPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2018, San Francisco, United States, 28/01/18. https://doi.org/10.1117/12.2289955

A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide. / Van Emmerik, Carlijn I.; Martinussen, Simen M.; Mu, Jinfeng; Dijkstra, Meindert; Kooijman, Roy; García-Blanco, Sonia M.

Integrated Optics: Devices, Materials, and Technologies XXII: Devices, Materials, and Technologies XXII. ed. / Sonia M. García-Blanco; Pavel Cheben. Vol. 10535 SPIE, 2018. p. 27 105350U (INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII).

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

TY - CHAP

T1 - A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide

AU - Van Emmerik, Carlijn I.

AU - Martinussen, Simen M.

AU - Mu, Jinfeng

AU - Dijkstra, Meindert

AU - Kooijman, Roy

AU - García-Blanco, Sonia M.

PY - 2018/1/1

Y1 - 2018/1/1

N2 - Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ∼1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer-with the desired final thickness of the KY(WO4)2 waveguide core-is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.

AB - Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ∼1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer-with the desired final thickness of the KY(WO4)2 waveguide core-is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.

KW - Bonding

KW - Heterogeneous integration

KW - Integrated optics

KW - Lapping

KW - Polishing.

KW - Potassium double tungstate

KW - heterogeneous integration

KW - lapping

KW - thinning

KW - bonding

KW - polishing

KW - high-contrast waveguide

KW - integrated optics

KW - potassium double tungstate

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DO - 10.1117/12.2289955

M3 - Chapter

SN - 9781510615557

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T3 - INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII

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BT - Integrated Optics: Devices, Materials, and Technologies XXII

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PB - SPIE

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Van Emmerik CI, Martinussen SM, Mu J, Dijkstra M, Kooijman R, García-Blanco SM. A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide. In García-Blanco SM, Cheben P, editors, Integrated Optics: Devices, Materials, and Technologies XXII: Devices, Materials, and Technologies XXII. Vol. 10535. SPIE. 2018. p. 27. 105350U. (INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII). https://doi.org/10.1117/12.2289955