Abstract
Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ∼1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer-with the desired final thickness of the KY(WO4)2 waveguide core-is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.
| Original language | English |
|---|---|
| Title of host publication | Integrated Optics: Devices, Materials, and Technologies XXII |
| Subtitle of host publication | Devices, Materials, and Technologies XXII |
| Editors | Sonia M. García-Blanco, Pavel Cheben |
| Publisher | SPIE |
| Pages | 27 |
| Volume | 10535 |
| ISBN (Electronic) | 9781510615557 |
| ISBN (Print) | 9781510615557 |
| DOIs | |
| Publication status | Published - 1 Jan 2018 |
| Event | SPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2018 - The Moscone Center, San Francisco, United States Duration: 28 Jan 2018 → 2 Feb 2018 |
Publication series
| Name | INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII |
|---|---|
| ISSN (Print) | 0277-786X |
Conference
| Conference | SPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2018 |
|---|---|
| Abbreviated title | OPTO |
| Country | United States |
| City | San Francisco |
| Period | 28/01/18 → 2/02/18 |
Fingerprint
Keywords
- Bonding
- Heterogeneous integration
- Integrated optics
- Lapping
- Polishing.
- Potassium double tungstate
- heterogeneous integration
- lapping
- thinning
- bonding
- polishing
- high-contrast waveguide
- integrated optics
- potassium double tungstate
Cite this
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A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide. / Van Emmerik, Carlijn I.; Martinussen, Simen M.; Mu, Jinfeng; Dijkstra, Meindert; Kooijman, Roy; García-Blanco, Sonia M.
Integrated Optics: Devices, Materials, and Technologies XXII: Devices, Materials, and Technologies XXII. ed. / Sonia M. García-Blanco; Pavel Cheben. Vol. 10535 SPIE, 2018. p. 27 105350U (INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII).Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review
TY - CHAP
T1 - A novel polishing stop for accurate integration of potassium yttrium double tungstate on a silicon dioxide
AU - Van Emmerik, Carlijn I.
AU - Martinussen, Simen M.
AU - Mu, Jinfeng
AU - Dijkstra, Meindert
AU - Kooijman, Roy
AU - García-Blanco, Sonia M.
PY - 2018/1/1
Y1 - 2018/1/1
N2 - Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ∼1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer-with the desired final thickness of the KY(WO4)2 waveguide core-is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.
AB - Rare-earth ion doped potassium yttrium double tungstate, RE:KY(WO4)2, is a promising candidate for the realization of on-chip lasers and amplifiers. Two major bottlenecks difficult the realization of compact, high-contrast devices. Firstly, the crystal can only be grown on a lattice matched substrate, leading to a low (<2×10-2) refractive index contrast between core and cladding. Secondly, the required thickness for the high-index contrast waveguides, ∼1 μm, makes a lapping and polishing approach very challenging. In this work we propose a novel polishing stop that will permit to accurately control the final thickness of the KY(WO4)2 waveguide within a few tens of nanometers. A 1 mm thick KY(WO4)2 substrate is flip-chip bonded with an adhesive layer onto a SiO2 substrate. Afterwards a low temperature pulsed laser deposited (PLD) Al2O3 layer-with the desired final thickness of the KY(WO4)2 waveguide core-is deposited on top of the assembly. The sample is then thinned using a multistep lapping and polishing procedure. Earlier work with a polishing stop made from SiO2, showed a decrease of the polishing speed with a factor 3-4, allowing the termination of the process within a tolerance of a few tens of nanometers.
KW - Bonding
KW - Heterogeneous integration
KW - Integrated optics
KW - Lapping
KW - Polishing.
KW - Potassium double tungstate
KW - heterogeneous integration
KW - lapping
KW - thinning
KW - bonding
KW - polishing
KW - high-contrast waveguide
KW - integrated optics
KW - potassium double tungstate
UR - http://www.scopus.com/inward/record.url?scp=85047721244&partnerID=8YFLogxK
UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10535/2289955/A-novel-polishing-stop-for-accurate-integration-of-potassium-yttrium/10.1117/12.2289955.full
UR - http://www.mendeley.com/research/novel-polishing-stop-accurate-integration-potassium-yttrium-double-tungstate-silicon-dioxide-platfor
U2 - 10.1117/12.2289955
DO - 10.1117/12.2289955
M3 - Chapter
SN - 9781510615557
VL - 10535
T3 - INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII
SP - 27
BT - Integrated Optics: Devices, Materials, and Technologies XXII
A2 - García-Blanco, Sonia M.
A2 - Cheben, Pavel
PB - SPIE
ER -