| Original language | English |
|---|---|
| Title of host publication | Proceedings Semiconductor Sensor and Actuator Technology, SeSens, Veldhoven |
| Place of Publication | Utrecht |
| Publisher | STW |
| Pages | 865-867 |
| Number of pages | 3 |
| ISBN (Print) | 90-73461-29-4 |
| Publication status | Published - 30 Nov 2001 |
Keywords
- METIS-200569
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