A physical model for dishing during metal CMP

V. Nguyen Hoang, Roel Daamen, H. van Kranenburg, Peter van der Velden, P.H. Woerlee

    Research output: Contribution to journalArticleAcademicpeer-review

    26 Citations (Scopus)

    Fingerprint Dive into the research topics of 'A physical model for dishing during metal CMP'. Together they form a unique fingerprint.