A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.
Original languageUndefined
Pages (from-to)125020
Number of pages11
JournalJournal of micromechanics and microengineering
Volume24
Issue number12
DOIs
Publication statusPublished - 26 Nov 2014

Keywords

  • EWI-26202
  • IR-96803
  • METIS-312689

Cite this

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title = "A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring",
abstract = "We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.",
keywords = "EWI-26202, IR-96803, METIS-312689",
author = "Maarten Groen and Kai Wu and Brookhuis, {Robert Anton} and {van Houwelingen}, {Marc J.} and Brouwer, {Dannis Michel} and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",
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doi = "10.1088/0960-1317/24/12/125020",
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volume = "24",
pages = "125020",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
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A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring. / Groen, Maarten; Wu, Kai; Brookhuis, Robert Anton; van Houwelingen, Marc J.; Brouwer, Dannis Michel; Lötters, Joost Conrad; Wiegerink, Remco J.

In: Journal of micromechanics and microengineering, Vol. 24, No. 12, 26.11.2014, p. 125020.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

AU - Groen, Maarten

AU - Wu, Kai

AU - Brookhuis, Robert Anton

AU - van Houwelingen, Marc J.

AU - Brouwer, Dannis Michel

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

N1 - eemcs-eprint-26202

PY - 2014/11/26

Y1 - 2014/11/26

N2 - We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.

AB - We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.

KW - EWI-26202

KW - IR-96803

KW - METIS-312689

U2 - 10.1088/0960-1317/24/12/125020

DO - 10.1088/0960-1317/24/12/125020

M3 - Article

VL - 24

SP - 125020

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 12

ER -