A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

Maarten Groen, Kai Wu, Robert Anton Brookhuis, Marc J. van Houwelingen, Dannis Michel Brouwer, Joost Conrad Lötters, Remco J. Wiegerink

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    We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.
    Original languageUndefined
    Pages (from-to)125020
    Number of pages11
    JournalJournal of micromechanics and microengineering
    Issue number12
    Publication statusPublished - 26 Nov 2014


    • EWI-26202
    • IR-96803
    • METIS-312689

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