Abstract
| Original language | Undefined |
|---|---|
| Pages (from-to) | 125020 |
| Number of pages | 11 |
| Journal | Journal of micromechanics and microengineering |
| Volume | 24 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 26 Nov 2014 |
Keywords
- EWI-26202
- IR-96803
- METIS-312689
Cite this
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A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring. / Groen, Maarten; Wu, Kai; Brookhuis, Robert Anton; van Houwelingen, Marc J.; Brouwer, Dannis Michel; Lötters, Joost Conrad; Wiegerink, Remco J.
In: Journal of micromechanics and microengineering, Vol. 24, No. 12, 26.11.2014, p. 125020.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - A piezoelectric micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring
AU - Groen, Maarten
AU - Wu, Kai
AU - Brookhuis, Robert Anton
AU - van Houwelingen, Marc J.
AU - Brouwer, Dannis Michel
AU - Lötters, Joost Conrad
AU - Wiegerink, Remco J.
N1 - eemcs-eprint-26202
PY - 2014/11/26
Y1 - 2014/11/26
N2 - We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.
AB - We have designed and characterized a MEMS microvalve with built-in capacitive displacement sensing and fitted it with a miniature piezoelectric actuator to achieve active valve control. The integrated displacement sensor enables high bandwidth proportional control of the gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. Using the capacitive sensor, we demonstrate negligible hysteresis in the valve control characteristics. Fabrication of the valve requires only two mask steps for deep reactive ion etching (DRIE) and one release etch.
KW - EWI-26202
KW - IR-96803
KW - METIS-312689
U2 - 10.1088/0960-1317/24/12/125020
DO - 10.1088/0960-1317/24/12/125020
M3 - Article
VL - 24
SP - 125020
JO - Journal of micromechanics and microengineering
JF - Journal of micromechanics and microengineering
SN - 0960-1317
IS - 12
ER -