The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).
van Lintel, H. T. G., van de Pol, F. C. M., & Bouwstra, S. (1988). A piezoelectric micropump based on micromachining of silicon. Sensors and actuators, 15(2), 153-167. https://doi.org/10.1016/0250-6874(88)87005-7