A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol*, S. Bouwstra

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademic

    535 Citations (Scopus)
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    The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).
    Original languageEnglish
    Pages (from-to)153-167
    JournalSensors and actuators
    Issue number2
    Publication statusPublished - 1988


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