A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol*, S. Bouwstra

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademic

    510 Citations (Scopus)
    198 Downloads (Pure)

    Abstract

    The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).
    Original languageEnglish
    Pages (from-to)153-167
    JournalSensors and actuators
    Volume15
    Issue number2
    DOIs
    Publication statusPublished - 1988

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