A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel; F.C.M. van de Pol; S. Bouwstra

doi:10.1016/0250-6874(88)87005-7

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel
, F.C.M. van de Pol^*
, S. Bouwstra

^*Corresponding author for this work

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Abstract

The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).

Original language	English
Pages (from-to)	153-167
Journal	Sensors and actuators
Volume	15
Issue number	2
DOIs	https://doi.org/10.1016/0250-6874(88)87005-7
Publication status	Published - 1988

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abstract = "The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).",

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AU - van Lintel, H.T.G.

AU - van de Pol, F.C.M.

AU - Bouwstra, S.

PY - 1988

Y1 - 1988

N2 - The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).

AB - The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).

U2 - 10.1016/0250-6874(88)87005-7

DO - 10.1016/0250-6874(88)87005-7

M3 - Article

SN - 0250-6874

VL - 15

SP - 153

EP - 167

JO - Sensors and actuators

JF - Sensors and actuators

IS - 2

ER -

A piezoelectric micropump based on micromachining of silicon

Abstract

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