A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol*, S. Bouwstra

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademic

    519 Citations (Scopus)
    214 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'A piezoelectric micropump based on micromachining of silicon'. Together they form a unique fingerprint.

    Engineering & Materials Science