A planar 3 dof sample manipulator for nano-scale characterization

B.R. de Jong; D.M. Brouwer; H.V. Jansen; M.J. de Boer; T.G. Lammertink; S. Stramigioli; G.J.M. Krijnen

doi:10.1109/MEMSYS.2006.1627908

A planar 3 dof sample manipulator for nano-scale characterization

B.R. de Jong, D.M. Brouwer, H.V. Jansen, M.J. de Boer, T.G. Lammertink, S. Stramigioli, G.J.M. Krijnen

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

25 Downloads (Pure)

Abstract

We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ±9 μm) as well as rotation about the z-axis (maximum of ±2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young’s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
Place of Publication	Los Alamitos, CA
Publisher	IEEE
Pages	750-753
Number of pages	4
ISBN (Print)	0-7803-9475-5
DOIs	https://doi.org/10.1109/MEMSYS.2006.1627908
Publication status	Published - Jan 2006
Event	19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey Duration: 22 Jan 2006 → 26 Jan 2006 Conference number: 19

Publication series

Name	IEEE International Conference on Micro Electro Mechanical Systems, MEMS
Publisher	IEEE
Volume	2006
ISSN (Print)	1084-6999

Conference

Conference	19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
Abbreviated title	MEMS
Country/Territory	Turkey
City	Istanbul
Period	22/01/06 → 26/01/06

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10.1109/MEMSYS.2006.1627908

Cite this

de Jong, B. R., Brouwer, D. M., Jansen, H. V., de Boer, M. J., Lammertink, T. G., Stramigioli, S., & Krijnen, G. J. M. (2006). A planar 3 dof sample manipulator for nano-scale characterization. In 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 (pp. 750-753). (IEEE International Conference on Micro Electro Mechanical Systems, MEMS; Vol. 2006). IEEE. https://doi.org/10.1109/MEMSYS.2006.1627908

@inproceedings{e5f5e86ee82840b08088238dfbf61151,

title = "A planar 3 dof sample manipulator for nano-scale characterization",

abstract = "We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ±9 μm) as well as rotation about the z-axis (maximum of ±2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young{\textquoteright}s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.",

author = "{de Jong}, B.R. and D.M. Brouwer and H.V. Jansen and {de Boer}, M.J. and T.G. Lammertink and S. Stramigioli and G.J.M. Krijnen",

year = "2006",

month = jan,

doi = "10.1109/MEMSYS.2006.1627908",

language = "English",

isbn = "0-7803-9475-5",

series = "IEEE International Conference on Micro Electro Mechanical Systems, MEMS",

publisher = "IEEE",

pages = "750--753",

booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006",

address = "United States",

note = "19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, MEMS ; Conference date: 22-01-2006 Through 26-01-2006",

}

de Jong, BR, Brouwer, DM, Jansen, HV, de Boer, MJ, Lammertink, TG, Stramigioli, S & Krijnen, GJM 2006, A planar 3 dof sample manipulator for nano-scale characterization. in 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006. IEEE International Conference on Micro Electro Mechanical Systems, MEMS, vol. 2006, IEEE, Los Alamitos, CA, pp. 750-753, 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, Istanbul, Turkey, 22/01/06. https://doi.org/10.1109/MEMSYS.2006.1627908

A planar 3 dof sample manipulator for nano-scale characterization. / de Jong, B.R.; Brouwer, D.M.; Jansen, H.V. et al.
19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006. Los Alamitos, CA: IEEE, 2006. p. 750-753 (IEEE International Conference on Micro Electro Mechanical Systems, MEMS; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - de Jong, B.R.

AU - Brouwer, D.M.

AU - Jansen, H.V.

AU - de Boer, M.J.

AU - Lammertink, T.G.

AU - Stramigioli, S.

AU - Krijnen, G.J.M.

N1 - Conference code: 19

PY - 2006/1

Y1 - 2006/1

N2 - We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ±9 μm) as well as rotation about the z-axis (maximum of ±2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young’s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.

AB - We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ±9 μm) as well as rotation about the z-axis (maximum of ±2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young’s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.

U2 - 10.1109/MEMSYS.2006.1627908

DO - 10.1109/MEMSYS.2006.1627908

M3 - Conference contribution

SN - 0-7803-9475-5

T3 - IEEE International Conference on Micro Electro Mechanical Systems, MEMS

SP - 750

EP - 753

BT - 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006

PB - IEEE

CY - Los Alamitos, CA

T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006

Y2 - 22 January 2006 through 26 January 2006

ER -

de Jong BR, Brouwer DM, Jansen HV, de Boer MJ, Lammertink TG, Stramigioli S et al. A planar 3 dof sample manipulator for nano-scale characterization. In 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006. Los Alamitos, CA: IEEE. 2006. p. 750-753. (IEEE International Conference on Micro Electro Mechanical Systems, MEMS). doi: 10.1109/MEMSYS.2006.1627908

A planar 3 dof sample manipulator for nano-scale characterization

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