A planar 3 dof sample manipulator for nano-scale characterization

B.R. de Jong, Dannis Michel Brouwer, Henricus V. Jansen, Meint J. de Boer, T.G. Lammertink, Stefano Stramigioli, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
20 Downloads (Pure)

Abstract

We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ±9 μm) as well as rotation about the z-axis (maximum of ±2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young’s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.
Original languageUndefined
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems, 2006
Place of PublicationLos Alamitos
PublisherIEEE
Pages750-753
Number of pages4
ISBN (Print)0-7803-9475-5
DOIs
Publication statusPublished - Jan 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey
Duration: 22 Jan 200626 Jan 2006
Conference number: 19

Publication series

Name
PublisherIEEE

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
Abbreviated titleMEMS
CountryTurkey
CityIstanbul
Period22/01/0626/01/06

Keywords

  • EWI-9107
  • IR-66881
  • METIS-228583
  • METIS-238761

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