A planar 3 dof sample manipulator for nano-scale characterization

B.R. de Jong, D.M. Brouwer, H.V. Jansen, M.J. de Boer, T.G. Lammertink, S. Stramigioli, G.J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
22 Downloads (Pure)

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Engineering & Materials Science