A polymer condenser micorphone realised on silicon containing preprocessed integrated circuits

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bergveld, P., Supervisor Olthuis, W., Co-Supervisor
Award date	22 Aug 1997
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	90-365-0994-7
Publication status	Published - 22 Aug 1997

Keywords

@phdthesis{a6a4209b1aa14edfa41a60365ca55c0b,

title = "A polymer condenser micorphone realised on silicon containing preprocessed integrated circuits",

keywords = "METIS-111403, IR-13966",

author = "Michael Pedersen",

year = "1997",

month = aug,

day = "22",

language = "English",

isbn = "90-365-0994-7",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}