A porous actuator for an Isfet-based coulometric sensor-actuator system

J. Luo, W. Olthuis, P. Bergveld, W.E. van der Linden, M. Bos

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    157 Downloads (Pure)

    Abstract

    The previously developed prototype ISFET (ion-sensitive field effect transistor)-based coulometric sensor-actuator system suffers from delay in response due to the nonzero distance between the sensor and actuator. The authors describe a novel configuration of a sensor-actuator device which employs a porous noble metal electrode as the actuator closely spaced around and over the gate of the ISFET. The novel device was characterized by performing an acid-to-base titration. The results showed that the delay time was considerably reduced. The titration times were found to be from 0.1 to 4.0 s. The corresponding concentrations of titrated species were from 0.5 to 15 mM
    Original languageEnglish
    Title of host publicationTRANSDUCERS '91
    Subtitle of host publication1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages229-232
    Number of pages4
    ISBN (Print)9780879425852
    DOIs
    Publication statusPublished - 25 Jun 1991
    Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
    Duration: 24 Jun 199127 Jun 1991

    Conference

    Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
    Abbreviated titleTRANSDUCERS '91
    Country/TerritoryUnited States
    CitySan Francisco
    Period24/06/9127/06/91

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