A Proposal Poly-Spacer Structure for Sub-01 um MOSFETs

N.N. Toan, P.C.S. Scholtens, R.W.C. Dekker, Antonius A.I. Aarnink, J. Holleman, N.D. Chien, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{d81cc0b030d84168938c03088144ceaa,

title = "A Proposal Poly-Spacer Structure for Sub-01 um MOSFETs",

keywords = "METIS-113905",

author = "N.N. Toan and P.C.S. Scholtens and R.W.C. Dekker and Aarnink, {Antonius A.I.} and J. Holleman and N.D. Chien and P.H. Woerlee",

year = "1999",

month = nov,

day = "2",

language = "Undefined",

pages = "86--89",

booktitle = "IWOMS'99",

}