A Proposal Poly-Spacer Structure for Sub-01 um MOSFETs

N.N. Toan, P.C.S. Scholtens, R.W.C. Dekker, Antonius A.I. Aarnink, J. Holleman, N.D. Chien, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIWOMS'99
    Place of PublicationHanoi, Vietnam
    Pages86-89
    Number of pages4
    Publication statusPublished - 2 Nov 1999

    Keywords

    • METIS-113905

    Cite this

    Toan, N. N., Scholtens, P. C. S., Dekker, R. W. C., Aarnink, A. A. I., Holleman, J., Chien, N. D., & Woerlee, P. H. (1999). A Proposal Poly-Spacer Structure for Sub-01 um MOSFETs. In IWOMS'99 (pp. 86-89). Hanoi, Vietnam.