A Proposal Poly-Spacer Structure for Sub-01 um MOSFETs

N.N. Toan, P.C.S. Scholtens, R.W.C. Dekker, Antonius A.I. Aarnink, J. Holleman, N.D. Chien, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIWOMS'99
    Place of PublicationHanoi, Vietnam
    Number of pages4
    Publication statusPublished - 2 Nov 1999


    • METIS-113905

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