Abstract
An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing.
Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
Original language | English |
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Article number | 10.1109/LED.2008.925649 |
Pages (from-to) | 585-588 |
Number of pages | 4 |
Journal | IEEE electron device letters |
Volume | 29 |
Issue number | DTR08-9/6 |
DOIs | |
Publication status | Published - 20 May 2008 |
Keywords
- SC-RID: Radiation Imaging detectors
- Terms—Microsensors
- Nuclear imaging
- Radiation detectors
- SU-8
- Wafer postprocessing
- Wafer-scale integration