An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
- SC-RID: Radiation Imaging detectors
Blanco Carballo, V. M., Chefdeville, M. A., Fransen, M., van der Graaf, H., Melai, J., Salm, C., ... Timmermans, J. (2008). A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE electron device letters, 29(DTR08-9/6), 585-588. [10.1109/LED.2008.925649]. https://doi.org/10.1109/LED.2008.925649