A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

Victor Manuel Blanco Carballo; Maximilien Chefdeville; Martin Fransen; Harry van der Graaf; Joost Melai; Cora Salm; Jurriaan Schmitz; Jan Timmermans

doi:10.1109/LED.2008.925649

A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

Victor Manuel Blanco Carballo, Maximilien Chefdeville, Martin Fransen, Harry van der Graaf, Joost Melai, Cora Salm, Jurriaan Schmitz, Jan Timmermans

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Abstract

An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.

Original language	English
Article number	10.1109/LED.2008.925649
Pages (from-to)	585-588
Number of pages	4
Journal	IEEE electron device letters
Volume	29
Issue number	DTR08-9/6
DOIs	https://doi.org/10.1109/LED.2008.925649
Publication status	Published - 20 May 2008

Keywords

SC-RID: Radiation Imaging detectors
Terms—Microsensors
Nuclear imaging
Radiation detectors
SU-8
Wafer postprocessing
Wafer-scale integration

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10.1109/LED.2008.925649

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abstract = "An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.",

keywords = "SC-RID: Radiation Imaging detectors, Terms—Microsensors, Nuclear imaging, Radiation detectors, SU-8, Wafer postprocessing, Wafer-scale integration",

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AU - Blanco Carballo, Victor Manuel

AU - Chefdeville, Maximilien

AU - Fransen, Martin

AU - van der Graaf, Harry

AU - Melai, Joost

AU - Salm, Cora

AU - Schmitz, Jurriaan

AU - Timmermans, Jan

PY - 2008/5/20

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AB - An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.

KW - SC-RID: Radiation Imaging detectors

KW - Terms—Microsensors

KW - Nuclear imaging

KW - Radiation detectors

KW - SU-8

KW - Wafer postprocessing

KW - Wafer-scale integration

U2 - 10.1109/LED.2008.925649

DO - 10.1109/LED.2008.925649

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SN - 0741-3106

IS - DTR08-9/6

M1 - 10.1109/LED.2008.925649

ER -

A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

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Keywords

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