A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

V.M. Blanco Carballo, M.A. Chefdeville, Martin Fransen, Harry van der Graaf, J. Melai, Cora Salm, Jurriaan Schmitz, J. Timmermans, Jan Timmermans

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
Original languageUndefined
Article number10.1109/LED.2008.925649
Pages (from-to)585-588
Number of pages4
JournalIEEE electron device letters
Volume29
Issue numberDTR08-9/6
DOIs
Publication statusPublished - 20 May 2008

Keywords

  • SC-RID: Radiation Imaging detectors
  • EWI-13048
  • IR-62384
  • METIS-251071

Cite this

Blanco Carballo, V. M., Chefdeville, M. A., Fransen, M., van der Graaf, H., Melai, J., Salm, C., ... Timmermans, J. (2008). A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE electron device letters, 29(DTR08-9/6), 585-588. [10.1109/LED.2008.925649]. https://doi.org/10.1109/LED.2008.925649
Blanco Carballo, V.M. ; Chefdeville, M.A. ; Fransen, Martin ; van der Graaf, Harry ; Melai, J. ; Salm, Cora ; Schmitz, Jurriaan ; Timmermans, J. ; Timmermans, Jan. / A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. In: IEEE electron device letters. 2008 ; Vol. 29, No. DTR08-9/6. pp. 585-588.
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note = "Terms—Microsensors, nuclear imaging, radiation detectors, SU-8, wafer postprocessing, wafer-scale integration",
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Blanco Carballo, VM, Chefdeville, MA, Fransen, M, van der Graaf, H, Melai, J, Salm, C, Schmitz, J, Timmermans, J & Timmermans, J 2008, 'A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip' IEEE electron device letters, vol. 29, no. DTR08-9/6, 10.1109/LED.2008.925649, pp. 585-588. https://doi.org/10.1109/LED.2008.925649

A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. / Blanco Carballo, V.M.; Chefdeville, M.A.; Fransen, Martin; van der Graaf, Harry; Melai, J.; Salm, Cora; Schmitz, Jurriaan; Timmermans, J.; Timmermans, Jan.

In: IEEE electron device letters, Vol. 29, No. DTR08-9/6, 10.1109/LED.2008.925649, 20.05.2008, p. 585-588.

Research output: Contribution to journalArticleAcademicpeer-review

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AU - Blanco Carballo, V.M.

AU - Chefdeville, M.A.

AU - Fransen, Martin

AU - van der Graaf, Harry

AU - Melai, J.

AU - Salm, Cora

AU - Schmitz, Jurriaan

AU - Timmermans, J.

AU - Timmermans, Jan

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PY - 2008/5/20

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N2 - An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.

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KW - EWI-13048

KW - IR-62384

KW - METIS-251071

U2 - 10.1109/LED.2008.925649

DO - 10.1109/LED.2008.925649

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Blanco Carballo VM, Chefdeville MA, Fransen M, van der Graaf H, Melai J, Salm C et al. A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE electron device letters. 2008 May 20;29(DTR08-9/6):585-588. 10.1109/LED.2008.925649. https://doi.org/10.1109/LED.2008.925649