A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

V.M. Blanco Carballo, M.A. Chefdeville, Martin Fransen, Harry van der Graaf, J. Melai, Cora Salm, Jurriaan Schmitz, J. Timmermans, Jan Timmermans

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    An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
    Original languageUndefined
    Article number10.1109/LED.2008.925649
    Pages (from-to)585-588
    Number of pages4
    JournalIEEE electron device letters
    Issue numberDTR08-9/6
    Publication statusPublished - 20 May 2008


    • SC-RID: Radiation Imaging detectors
    • EWI-13048
    • IR-62384
    • METIS-251071

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