A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

Victor Manuel Blanco Carballo, Maximilien Chefdeville, Martin Fransen, Harry van der Graaf, Joost Melai, Cora Salm, Jurriaan Schmitz, Jan Timmermans

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    25 Citations (Scopus)
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    An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
    Original languageEnglish
    Article number10.1109/LED.2008.925649
    Pages (from-to)585-588
    Number of pages4
    JournalIEEE electron device letters
    Issue numberDTR08-9/6
    Publication statusPublished - 20 May 2008


    • SC-RID: Radiation Imaging detectors
    • Terms—Microsensors
    • Nuclear imaging
    • Radiation detectors
    • SU-8
    • Wafer postprocessing
    • Wafer-scale integration


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