TY - JOUR
T1 - A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip
AU - Blanco Carballo, V.M.
AU - Chefdeville, M.A.
AU - Fransen, Martin
AU - van der Graaf, Harry
AU - Melai, J.
AU - Salm, Cora
AU - Schmitz, Jurriaan
AU - Timmermans, J.
AU - Timmermans, Jan
N1 - Terms—Microsensors, nuclear imaging, radiation detectors, SU-8, wafer postprocessing, wafer-scale integration
PY - 2008/5/20
Y1 - 2008/5/20
N2 - An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing.
Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
AB - An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing.
Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
KW - SC-RID: Radiation Imaging detectors
KW - EWI-13048
KW - IR-62384
KW - METIS-251071
U2 - 10.1109/LED.2008.925649
DO - 10.1109/LED.2008.925649
M3 - Article
VL - 29
SP - 585
EP - 588
JO - IEEE electron device letters
JF - IEEE electron device letters
SN - 0741-3106
IS - DTR08-9/6
M1 - 10.1109/LED.2008.925649
ER -