A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

V.M. Blanco Carballo, M.A. Chefdeville, Martin Fransen, Harry van der Graaf, J. Melai, Cora Salm, Jurriaan Schmitz, J. Timmermans, Jan Timmermans

    Research output: Contribution to journalArticleAcademicpeer-review

    24 Citations (Scopus)
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    Abstract

    An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.
    Original languageUndefined
    Article number10.1109/LED.2008.925649
    Pages (from-to)585-588
    Number of pages4
    JournalIEEE electron device letters
    Volume29
    Issue numberDTR08-9/6
    DOIs
    Publication statusPublished - 20 May 2008

    Keywords

    • SC-RID: Radiation Imaging detectors
    • EWI-13048
    • IR-62384
    • METIS-251071

    Cite this

    Blanco Carballo, V. M., Chefdeville, M. A., Fransen, M., van der Graaf, H., Melai, J., Salm, C., ... Timmermans, J. (2008). A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE electron device letters, 29(DTR08-9/6), 585-588. [10.1109/LED.2008.925649]. https://doi.org/10.1109/LED.2008.925649
    Blanco Carballo, V.M. ; Chefdeville, M.A. ; Fransen, Martin ; van der Graaf, Harry ; Melai, J. ; Salm, Cora ; Schmitz, Jurriaan ; Timmermans, J. ; Timmermans, Jan. / A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. In: IEEE electron device letters. 2008 ; Vol. 29, No. DTR08-9/6. pp. 585-588.
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    abstract = "An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.",
    keywords = "SC-RID: Radiation Imaging detectors, EWI-13048, IR-62384, METIS-251071",
    author = "{Blanco Carballo}, V.M. and M.A. Chefdeville and Martin Fransen and {van der Graaf}, Harry and J. Melai and Cora Salm and Jurriaan Schmitz and J. Timmermans and Jan Timmermans",
    note = "Terms—Microsensors, nuclear imaging, radiation detectors, SU-8, wafer postprocessing, wafer-scale integration",
    year = "2008",
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    doi = "10.1109/LED.2008.925649",
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    Blanco Carballo, VM, Chefdeville, MA, Fransen, M, van der Graaf, H, Melai, J, Salm, C, Schmitz, J, Timmermans, J & Timmermans, J 2008, 'A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip', IEEE electron device letters, vol. 29, no. DTR08-9/6, 10.1109/LED.2008.925649, pp. 585-588. https://doi.org/10.1109/LED.2008.925649

    A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. / Blanco Carballo, V.M.; Chefdeville, M.A.; Fransen, Martin; van der Graaf, Harry; Melai, J.; Salm, Cora; Schmitz, Jurriaan; Timmermans, J.; Timmermans, Jan.

    In: IEEE electron device letters, Vol. 29, No. DTR08-9/6, 10.1109/LED.2008.925649, 20.05.2008, p. 585-588.

    Research output: Contribution to journalArticleAcademicpeer-review

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    AU - Fransen, Martin

    AU - van der Graaf, Harry

    AU - Melai, J.

    AU - Salm, Cora

    AU - Schmitz, Jurriaan

    AU - Timmermans, J.

    AU - Timmermans, Jan

    N1 - Terms—Microsensors, nuclear imaging, radiation detectors, SU-8, wafer postprocessing, wafer-scale integration

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    N2 - An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. Thisletter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3-D radiation tracks on the spot.

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    KW - SC-RID: Radiation Imaging detectors

    KW - EWI-13048

    KW - IR-62384

    KW - METIS-251071

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    Blanco Carballo VM, Chefdeville MA, Fransen M, van der Graaf H, Melai J, Salm C et al. A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE electron device letters. 2008 May 20;29(DTR08-9/6):585-588. 10.1109/LED.2008.925649. https://doi.org/10.1109/LED.2008.925649