A review of silicon microphones

P.R. Scheeper, A.G.H. van der Donk, W. Olthuis, P. Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

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    Abstract

    Silicon micromachining has successfully been applied to fabricate piezoelectric, piezoresistive and capactive microphones. The use of silicon has allowed the fabrication of microphones with integrated electronic circuitry and the development of the new FET microphone. The introduction of lithographic techniques has resulted in microphones with very small (1 mm2) diaphragms and with specially shaped backplates. The application of corrugated diaphragms seems a promising future development for silicon microphones. It is concluded from a noise consideration that the FET microphone shows a high noise level, which is mainly due to the small sensor capacitance. From this noise consideration, it can be shown that integration of a capacitive microphone and a preamplifier will result in a further reduction of the noise.
    Original languageEnglish
    Pages (from-to)1-11
    JournalSensors and actuators. A: Physical
    Volume44
    Issue number1
    DOIs
    Publication statusPublished - 1994

    Fingerprint

    Silicon
    Microphones
    microphones
    silicon
    diaphragms
    Diaphragms
    Field effect transistors
    field effect transistors
    preamplifiers
    Micromachining
    micromachining
    Capacitance
    capacitance
    Fabrication
    fabrication
    sensors
    Sensors
    electronics

    Cite this

    Scheeper, P.R. ; van der Donk, A.G.H. ; Olthuis, W. ; Bergveld, P. / A review of silicon microphones. In: Sensors and actuators. A: Physical. 1994 ; Vol. 44, No. 1. pp. 1-11.
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    abstract = "Silicon micromachining has successfully been applied to fabricate piezoelectric, piezoresistive and capactive microphones. The use of silicon has allowed the fabrication of microphones with integrated electronic circuitry and the development of the new FET microphone. The introduction of lithographic techniques has resulted in microphones with very small (1 mm2) diaphragms and with specially shaped backplates. The application of corrugated diaphragms seems a promising future development for silicon microphones. It is concluded from a noise consideration that the FET microphone shows a high noise level, which is mainly due to the small sensor capacitance. From this noise consideration, it can be shown that integration of a capacitive microphone and a preamplifier will result in a further reduction of the noise.",
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    Scheeper, PR, van der Donk, AGH, Olthuis, W & Bergveld, P 1994, 'A review of silicon microphones', Sensors and actuators. A: Physical, vol. 44, no. 1, pp. 1-11. https://doi.org/10.1016/0924-4247(94)00790-X

    A review of silicon microphones. / Scheeper, P.R.; van der Donk, A.G.H.; Olthuis, W.; Bergveld, P.

    In: Sensors and actuators. A: Physical, Vol. 44, No. 1, 1994, p. 1-11.

    Research output: Contribution to journalArticleAcademicpeer-review

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    AB - Silicon micromachining has successfully been applied to fabricate piezoelectric, piezoresistive and capactive microphones. The use of silicon has allowed the fabrication of microphones with integrated electronic circuitry and the development of the new FET microphone. The introduction of lithographic techniques has resulted in microphones with very small (1 mm2) diaphragms and with specially shaped backplates. The application of corrugated diaphragms seems a promising future development for silicon microphones. It is concluded from a noise consideration that the FET microphone shows a high noise level, which is mainly due to the small sensor capacitance. From this noise consideration, it can be shown that integration of a capacitive microphone and a preamplifier will result in a further reduction of the noise.

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