A review of silicon microphones

P.R. Scheeper, A.G.H. van der Donk, W. Olthuis, P. Bergveld

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    Silicon micromachining has successfully been applied to fabricate piezoelectric, piezoresistive and capactive microphones. The use of silicon has allowed the fabrication of microphones with integrated electronic circuitry and the development of the new FET microphone. The introduction of lithographic techniques has resulted in microphones with very small (1 mm2) diaphragms and with specially shaped backplates. The application of corrugated diaphragms seems a promising future development for silicon microphones. It is concluded from a noise consideration that the FET microphone shows a high noise level, which is mainly due to the small sensor capacitance. From this noise consideration, it can be shown that integration of a capacitive microphone and a preamplifier will result in a further reduction of the noise.
    Original languageEnglish
    Pages (from-to)1-11
    JournalSensors and actuators. A: Physical
    Issue number1
    Publication statusPublished - 1994


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