A roadmap to a technological platform for integrating nanophotonic structures with micromechanical systems in silicon-on-insulator

Jacek K. Zientkiewicz, Zbigniew T. Lach, Piotr Grabiec, A. Driessen, Bozena Jaskorzynska, Lech Wosinski

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

On the foundation of joint experience acquired by several research centres there was defined the roadmap to the desired single technological platform for fabrication of a specific class of photonic integrated circuits, which are controlled by mechanical means. In the paper the challenges of fabrication of such photonic circuits are discussed. The main arguments in favour of the Silicon-on-Insulator materials system as the basis for the platform are presented. Options for the mechanics-to-optics arrangement, materials and processes are described and illustrated with the current achievements from the authors' labs. In the roadmap the preference is given to the vertical arrangement in which, the mechanical part is stacked above the waveguiding layer. A flexible trimming routine is designed to complement the process flow if the technologies developed cannot provide the required reproducibility.
Original languageUndefined
Title of host publicationIntegrated Optics: Theory and Applications
EditorsTadeusz Pustelny, Paul Lambeck, Christophe Gorecki
Place of PublicationWashington, USA
PublisherSPIE - The International Society for Optical Engineering
Pages59560H
Number of pages11
ISBN (Print)0819459631
DOIs
Publication statusPublished - Aug 2005

Publication series

NameProceedings of SPIE
PublisherSPIE The International Society for Optical Engineering
Volume5956
ISSN (Print)0277-786X

Keywords

  • Waveguide optical resonators
  • Silicon on insulator technology
  • add-drop filters
  • IR-62275
  • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
  • EWI-12364
  • METIS-228318
  • mechanically assisted photonic integrated circuits
  • micro/nano-mechanical systems

Cite this

Zientkiewicz, J. K., Lach, Z. T., Grabiec, P., Driessen, A., Jaskorzynska, B., & Wosinski, L. (2005). A roadmap to a technological platform for integrating nanophotonic structures with micromechanical systems in silicon-on-insulator. In T. Pustelny, P. Lambeck, & C. Gorecki (Eds.), Integrated Optics: Theory and Applications (pp. 59560H). [10.1117/12.622442] (Proceedings of SPIE; Vol. 5956). Washington, USA: SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.622442
Zientkiewicz, Jacek K. ; Lach, Zbigniew T. ; Grabiec, Piotr ; Driessen, A. ; Jaskorzynska, Bozena ; Wosinski, Lech. / A roadmap to a technological platform for integrating nanophotonic structures with micromechanical systems in silicon-on-insulator. Integrated Optics: Theory and Applications. editor / Tadeusz Pustelny ; Paul Lambeck ; Christophe Gorecki. Washington, USA : SPIE - The International Society for Optical Engineering, 2005. pp. 59560H (Proceedings of SPIE).
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abstract = "On the foundation of joint experience acquired by several research centres there was defined the roadmap to the desired single technological platform for fabrication of a specific class of photonic integrated circuits, which are controlled by mechanical means. In the paper the challenges of fabrication of such photonic circuits are discussed. The main arguments in favour of the Silicon-on-Insulator materials system as the basis for the platform are presented. Options for the mechanics-to-optics arrangement, materials and processes are described and illustrated with the current achievements from the authors' labs. In the roadmap the preference is given to the vertical arrangement in which, the mechanical part is stacked above the waveguiding layer. A flexible trimming routine is designed to complement the process flow if the technologies developed cannot provide the required reproducibility.",
keywords = "Waveguide optical resonators, Silicon on insulator technology, add-drop filters, IR-62275, IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY, EWI-12364, METIS-228318, mechanically assisted photonic integrated circuits, micro/nano-mechanical systems",
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Zientkiewicz, JK, Lach, ZT, Grabiec, P, Driessen, A, Jaskorzynska, B & Wosinski, L 2005, A roadmap to a technological platform for integrating nanophotonic structures with micromechanical systems in silicon-on-insulator. in T Pustelny, P Lambeck & C Gorecki (eds), Integrated Optics: Theory and Applications., 10.1117/12.622442, Proceedings of SPIE, vol. 5956, SPIE - The International Society for Optical Engineering, Washington, USA, pp. 59560H. https://doi.org/10.1117/12.622442

A roadmap to a technological platform for integrating nanophotonic structures with micromechanical systems in silicon-on-insulator. / Zientkiewicz, Jacek K.; Lach, Zbigniew T.; Grabiec, Piotr; Driessen, A.; Jaskorzynska, Bozena; Wosinski, Lech.

Integrated Optics: Theory and Applications. ed. / Tadeusz Pustelny; Paul Lambeck; Christophe Gorecki. Washington, USA : SPIE - The International Society for Optical Engineering, 2005. p. 59560H 10.1117/12.622442 (Proceedings of SPIE; Vol. 5956).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - On the foundation of joint experience acquired by several research centres there was defined the roadmap to the desired single technological platform for fabrication of a specific class of photonic integrated circuits, which are controlled by mechanical means. In the paper the challenges of fabrication of such photonic circuits are discussed. The main arguments in favour of the Silicon-on-Insulator materials system as the basis for the platform are presented. Options for the mechanics-to-optics arrangement, materials and processes are described and illustrated with the current achievements from the authors' labs. In the roadmap the preference is given to the vertical arrangement in which, the mechanical part is stacked above the waveguiding layer. A flexible trimming routine is designed to complement the process flow if the technologies developed cannot provide the required reproducibility.

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KW - add-drop filters

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KW - METIS-228318

KW - mechanically assisted photonic integrated circuits

KW - micro/nano-mechanical systems

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M3 - Conference contribution

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T3 - Proceedings of SPIE

SP - 59560H

BT - Integrated Optics: Theory and Applications

A2 - Pustelny, Tadeusz

A2 - Lambeck, Paul

A2 - Gorecki, Christophe

PB - SPIE - The International Society for Optical Engineering

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Zientkiewicz JK, Lach ZT, Grabiec P, Driessen A, Jaskorzynska B, Wosinski L. A roadmap to a technological platform for integrating nanophotonic structures with micromechanical systems in silicon-on-insulator. In Pustelny T, Lambeck P, Gorecki C, editors, Integrated Optics: Theory and Applications. Washington, USA: SPIE - The International Society for Optical Engineering. 2005. p. 59560H. 10.1117/12.622442. (Proceedings of SPIE). https://doi.org/10.1117/12.622442