A roadmap to a technological platform for integrating nanophotonic structures with micromechanical systems in silicon-on-insulator

Jacek K. Zientkiewicz, Zbigniew T. Lach, Piotr Grabiec, A. Driessen, Bozena Jaskorzynska, Lech Wosinski

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


    On the foundation of joint experience acquired by several research centres there was defined the roadmap to the desired single technological platform for fabrication of a specific class of photonic integrated circuits, which are controlled by mechanical means. In the paper the challenges of fabrication of such photonic circuits are discussed. The main arguments in favour of the Silicon-on-Insulator materials system as the basis for the platform are presented. Options for the mechanics-to-optics arrangement, materials and processes are described and illustrated with the current achievements from the authors' labs. In the roadmap the preference is given to the vertical arrangement in which, the mechanical part is stacked above the waveguiding layer. A flexible trimming routine is designed to complement the process flow if the technologies developed cannot provide the required reproducibility.
    Original languageUndefined
    Title of host publicationIntegrated Optics: Theory and Applications
    EditorsTadeusz Pustelny, Paul Lambeck, Christophe Gorecki
    Place of PublicationWashington, USA
    PublisherSPIE - The International Society for Optical Engineering
    Number of pages11
    ISBN (Print)0819459631
    Publication statusPublished - Aug 2005
    EventIntegrated Optics: Theory and Applications - Warsaw, Poland
    Duration: 1 Aug 20051 Aug 2005

    Publication series

    NameProceedings of SPIE
    PublisherSPIE The International Society for Optical Engineering
    ISSN (Print)0277-786X


    ConferenceIntegrated Optics: Theory and Applications
    Other28 August- 2 September


    • Waveguide optical resonators
    • Silicon on insulator technology
    • add-drop filters
    • IR-62275
    • EWI-12364
    • METIS-228318
    • mechanically assisted photonic integrated circuits
    • micro/nano-mechanical systems

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