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A Self-Aligned Wafer-Scale Gate-All-Around Aperture Definition Method for Silicon Nanostructures
Dirk Jonker, Erwin J.W. Berenschot, Roald M. Tiggelaar, Niels R. Tas, Arie Van Houselt, Han J.G.E. Gardeniers
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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