@inproceedings{52dc96713bae4cebb81a548a559b768b,
title = "A silicon-based electrical source for surface plasmon polaritons",
abstract = "This work demonstrates the fabrication of a silicon-based electrical source for surface plasmon polaritons (SPPs) at low temperatures using silicon nanocrystal doped alumina within a metal-insulator-metal (MIM) waveguide geometry. The fabrication method uses established microtechnology processes that are compatible with backend CMOS technology. The fabricated device suggests a route forward towards high density, active plasmonic circuits that are integrated with silicon microelectronics.",
keywords = "METIS-265806, SC-ICF: Integrated Circuit Fabrication, EWI-17465, IR-70009",
author = "Walters, {Robert J.} and {van Loon}, {Rob V.A.} and I. Brunets and Jurriaan Schmitz and Albert Polman",
note = "10.1109/GROUP4.2009.5338358 ; null ; Conference date: 09-09-2009 Through 11-09-2009",
year = "2009",
month = sep,
day = "9",
doi = "10.1109/GROUP4.2009.5338358",
language = "Undefined",
isbn = "978-1-4244-4402-1",
publisher = "IEEE",
pages = "74--76",
booktitle = "Proceedings of the 6th International Conference on GroupIV Photonics GFP'09",
}