A Silicon Condenser Microphone: Materials and Technology

P.R. Scheeper

    Research output: Thesis › PhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Bergveld, Piet, Supervisor
    • Olthuis, Wouter , Advisor
    Award date8 Apr 1993
    Place of PublicationEnschede
    Print ISBNs90-9005899-0
    Publication statusPublished - 8 Apr 1993

    Keywords

    • METIS-111394

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