A silicon condenser microphone with a silicon nitride diaphragm and backplate

P.R. Scheeper, W. Olthuis, P. Bergveld

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 16 Mar 1993
Event	Sensortechnologie Workshop 1993: (STW Workshop Sensor Technology) - Nationaal Sportcentrum Papendal, Arnhem, Netherlands Duration: 16 Mar 1993 → 17 Mar 1993

Conference	Sensortechnologie Workshop 1993
Country/Territory	Netherlands
City	Arnhem
Period	16/03/93 → 17/03/93

Cite this

@conference{8a0e40186c154eb8b94eb36f8f938688,

title = "A silicon condenser microphone with a silicon nitride diaphragm and backplate",

author = "P.R. Scheeper and W. Olthuis and P. Bergveld",

year = "1993",

month = mar,

day = "16",

language = "English",

note = "Sensortechnologie Workshop 1993 : (STW Workshop Sensor Technology) ; Conference date: 16-03-1993 Through 17-03-1993",

}