A silicon condenser microphone with polyimide diaphragm and backplate

M. Pedersen; Wouter Olthuis; Piet Bergveld

doi:10.1016/S0924-4247(97)01532-X

A silicon condenser microphone with polyimide diaphragm and backplate

M. Pedersen, Wouter Olthuis, Piet Bergveld

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.

Original language	Undefined
Pages (from-to)	97-104
Journal	Sensors and actuators. A: Physical
Volume	A63
Issue number	2
DOIs	https://doi.org/10.1016/S0924-4247(97)01532-X
Publication status	Published - 1997

Keywords

METIS-111966
IR-15081

Access to Document

10.1016/S0924-4247(97)01532-X

Pedersen97silicon

Cite this

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N2 - A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.

AB - A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.

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KW - IR-15081

U2 - 10.1016/S0924-4247(97)01532-X

DO - 10.1016/S0924-4247(97)01532-X

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JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

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