A silicon condenser microphone with polyimide diaphragm and backplate

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    47 Citations (Scopus)
    76 Downloads (Pure)

    Abstract

    A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.
    Original languageUndefined
    Pages (from-to)97-104
    JournalSensors and actuators. A: Physical
    VolumeA63
    Issue number2
    DOIs
    Publication statusPublished - 1997

    Keywords

    • METIS-111966
    • IR-15081

    Cite this

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    title = "A silicon condenser microphone with polyimide diaphragm and backplate",
    abstract = "A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.",
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    author = "M. Pedersen and Wouter Olthuis and Piet Bergveld",
    year = "1997",
    doi = "10.1016/S0924-4247(97)01532-X",
    language = "Undefined",
    volume = "A63",
    pages = "97--104",
    journal = "Sensors and actuators. A: Physical",
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    A silicon condenser microphone with polyimide diaphragm and backplate. / Pedersen, M.; Olthuis, Wouter; Bergveld, Piet.

    In: Sensors and actuators. A: Physical, Vol. A63, No. 2, 1997, p. 97-104.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - A silicon condenser microphone with polyimide diaphragm and backplate

    AU - Pedersen, M.

    AU - Olthuis, Wouter

    AU - Bergveld, Piet

    PY - 1997

    Y1 - 1997

    N2 - A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.

    AB - A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.

    KW - METIS-111966

    KW - IR-15081

    U2 - 10.1016/S0924-4247(97)01532-X

    DO - 10.1016/S0924-4247(97)01532-X

    M3 - Article

    VL - A63

    SP - 97

    EP - 104

    JO - Sensors and actuators. A: Physical

    JF - Sensors and actuators. A: Physical

    SN - 0924-4247

    IS - 2

    ER -