A silicon condenser microphone with polyimide diaphragm and backplate

M. Pedersen, Wouter Olthuis, Piet Bergveld

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    Abstract

    A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.
    Original languageUndefined
    Pages (from-to)97-104
    JournalSensors and actuators. A: Physical
    VolumeA63
    Issue number2
    DOIs
    Publication statusPublished - 1997

    Keywords

    • METIS-111966
    • IR-15081

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