TY - JOUR
T1 - A silicon condenser microphone with polyimide diaphragm and backplate
AU - Pedersen, Michael
AU - Olthuis, Wouter
AU - Bergveld, Piet
PY - 1997
Y1 - 1997
N2 - A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.
AB - A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.
U2 - 10.1016/S0924-4247(97)01532-X
DO - 10.1016/S0924-4247(97)01532-X
M3 - Article
SN - 0924-4247
VL - A63
SP - 97
EP - 104
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 2
ER -