A silicon condensor microphone with a silicon nitride diaphragm and backplate

P.R. Scheeper, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 1 Jun 1992
    Event3rd MicroMechanics Europe Workshop, MME 1992 - Leuven, Belgium
    Duration: 1 Jun 19922 Jun 1992
    Conference number: 3

    Conference

    Conference3rd MicroMechanics Europe Workshop, MME 1992
    Abbreviated titleMME
    CountryBelgium
    CityLeuven
    Period1/06/922/06/92

    Keywords

    • METIS-118139

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