A silicon condensor microphone with a silicon nitride diaphragm and backplate

P.R. Scheeper, Wouter Olthuis, Piet Bergveld

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 1 Jun 1992
Event	3rd MicroMechanics Europe Workshop, MME 1992 - Leuven, Belgium Duration: 1 Jun 1992 → 2 Jun 1992 Conference number: 3

Conference	3rd MicroMechanics Europe Workshop, MME 1992
Abbreviated title	MME
Country/Territory	Belgium
City	Leuven
Period	1/06/92 → 2/06/92

Keywords

@conference{660e6d35ce7c4ff7aa6ecc7227009b85,

title = "A silicon condensor microphone with a silicon nitride diaphragm and backplate",

keywords = "METIS-118139",

author = "P.R. Scheeper and Wouter Olthuis and Piet Bergveld",

year = "1992",

month = jun,

day = "1",

language = "Undefined",

pages = "--",

note = "3rd MicroMechanics Europe Workshop, MME 1992 ; Conference date: 01-06-1992 Through 02-06-1992",

}