A silicon flow sensor for highly accurate mass flow measurement

Michel J.A.M. Van Putten; Pascal F.A.M. Van Putten

A silicon flow sensor for highly accurate mass flow measurement

Michel J.A.M. Van Putten
, Pascal F.A.M. Van Putten

Research output: Contribution to conference › Paper › peer-review

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Abstract

We describe a thermal, silicon integrated, mass flow sensor for highly accurate mass flow measurements over a large dynamic range. offset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically < 1% of reading, with a turndown larger than 1:1000.

Original language	English
Publication status	Published - 2000
Externally published	Yes
Event	10th Conference on Flow Measurement, FLOMEKO 2000 - Salvador, Bahia, Brazil Duration: 4 Jun 2000 → 8 Jun 2000 Conference number: 10

Conference

Conference	10th Conference on Flow Measurement, FLOMEKO 2000
Abbreviated title	FLOMEKO 2000
Country/Territory	Brazil
City	Salvador, Bahia
Period	4/06/00 → 8/06/00

Keywords

Silicon flow sensor
Thermal
Vanputten-ADM

Access to Document

IMEKO-TC9-2000-094Final published version, 214 KB

Cite this

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title = "A silicon flow sensor for highly accurate mass flow measurement",

abstract = "We describe a thermal, silicon integrated, mass flow sensor for highly accurate mass flow measurements over a large dynamic range. offset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically < 1\% of reading, with a turndown larger than 1:1000.",

keywords = "Silicon flow sensor, Thermal, Vanputten-ADM",

author = "\{Van Putten\}, \{Michel J.A.M.\} and \{Van Putten\}, \{Pascal F.A.M.\}",

year = "2000",

language = "English",

note = "10th Conference on Flow Measurement, FLOMEKO 2000, FLOMEKO 2000 ; Conference date: 04-06-2000 Through 08-06-2000",

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TY - CONF

T1 - A silicon flow sensor for highly accurate mass flow measurement

AU - Van Putten, Michel J.A.M.

AU - Van Putten, Pascal F.A.M.

N1 - Conference code: 10

PY - 2000

Y1 - 2000

N2 - We describe a thermal, silicon integrated, mass flow sensor for highly accurate mass flow measurements over a large dynamic range. offset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically < 1% of reading, with a turndown larger than 1:1000.

AB - We describe a thermal, silicon integrated, mass flow sensor for highly accurate mass flow measurements over a large dynamic range. offset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically < 1% of reading, with a turndown larger than 1:1000.

KW - Silicon flow sensor

KW - Thermal

KW - Vanputten-ADM

UR - https://www.scopus.com/pages/publications/84925372901

M3 - Paper

AN - SCOPUS:84925372901

T2 - 10th Conference on Flow Measurement, FLOMEKO 2000

Y2 - 4 June 2000 through 8 June 2000

ER -

A silicon flow sensor for highly accurate mass flow measurement

Abstract

Conference

Keywords

Access to Document

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Cite this