A silicon micromachined valve driven by a bi-stable electromagnetic actuator

S. Bohm, M.T. Korthorst, G.J. Burger, F. Roseboom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proc. of the Int. Mech. Eng. Congress ME'99, MEMS, Vol. 1
Place of Publication	Nashville, USA
Pages	223-227
Number of pages	5
Publication status	Published - 14 Nov 1999

Keywords

@inproceedings{d769bdccd1a544ad950906c14193f552,

title = "A silicon micromachined valve driven by a bi-stable electromagnetic actuator",

keywords = "METIS-113812",

author = "S. Bohm and M.T. Korthorst and G.J. Burger and F. Roseboom",

year = "1999",

month = nov,

day = "14",

language = "Undefined",

pages = "223--227",

booktitle = "Proc. of the Int. Mech. Eng. Congress ME'99, MEMS, Vol. 1",

}