A silicon micromachined valve driven by a bi-stable electromagnetic actuator

S. Bohm, M.T. Korthorst, G.J. Burger, F. Roseboom

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    190 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProc. of the Int. Mech. Eng. Congress ME'99, MEMS, Vol. 1
    Place of PublicationNashville, USA
    Pages223-227
    Number of pages5
    Publication statusPublished - 14 Nov 1999

    Keywords

    • METIS-113812

    Cite this

    Bohm, S., Korthorst, M. T., Burger, G. J., & Roseboom, F. (1999). A silicon micromachined valve driven by a bi-stable electromagnetic actuator. In Proc. of the Int. Mech. Eng. Congress ME'99, MEMS, Vol. 1 (pp. 223-227). Nashville, USA.