A silicon micromachined valve driven by a bi-stable electromagnetic actuator

S. Bohm, M.T. Korthorst, G.J. Burger, F. Roseboom

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    196 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProc. of the Int. Mech. Eng. Congress ME'99, MEMS, Vol. 1
    Place of PublicationNashville, USA
    Number of pages5
    Publication statusPublished - 14 Nov 1999


    • METIS-113812

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