A single-mask thermal displacement sensor in MEMS

R.P. Hogervorst, B. Krijnen, B. Krijnen, Dannis Michel Brouwer, Johannes Bernardus Charles Engelen, U. Staufer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

3 Citations (Scopus)
64 Downloads (Pure)

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Engineering & Materials Science