A spot size transformer for fiber chip coupling in sensor applications at 633 nm in silicon oxynitride

René M. de Ridder, Rokus A. Wijbrans, Hans Albers, Jacob S. Aukema, Paul V. Lambeck, Hugo J.W.M. Hoekstra, Alfred Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)
    76 Downloads (Pure)

    Abstract

    A mode-size adapter was designed, fabricated in SiON/SiO2 and tested. It consists of a laterally tapered SiON waveguide having a step-wise decrease in thickness towards the taper point which may have up to 0.5 ¿m residual width
    Original languageEnglish
    Title of host publication8th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS '95)
    Subtitle of host publicationConference Proceedings
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages86-87
    Volume2
    ISBN (Print)0-7803-2450-1
    DOIs
    Publication statusPublished - 30 Oct 1995
    Event8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995 - San Francisco, United States
    Duration: 30 Oct 199531 Oct 1995
    Conference number: 8

    Conference

    Conference8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995
    CountryUnited States
    CitySan Francisco
    Period30/10/9531/10/95

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