A spot size transformer for fiber chip coupling in sensor applications at 633 nm in silicon oxynitride

  • René M. de Ridder
  • , Rokus A. Wijbrans
  • , Hans Albers
  • , Jacob S. Aukema
  • , Paul V. Lambeck
  • , Hugo J.W.M. Hoekstra
  • , Alfred Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)
    159 Downloads (Pure)

    Abstract

    A mode-size adapter was designed, fabricated in SiON/SiO2 and tested. It consists of a laterally tapered SiON waveguide having a step-wise decrease in thickness towards the taper point which may have up to 0.5 ¿m residual width
    Original languageEnglish
    Title of host publication8th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS '95)
    Subtitle of host publicationConference Proceedings
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages86-87
    Volume2
    ISBN (Print)0-7803-2450-1
    DOIs
    Publication statusPublished - 30 Oct 1995
    Event8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995 - San Francisco, United States
    Duration: 30 Oct 199531 Oct 1995
    Conference number: 8

    Conference

    Conference8th Annual Meeting of the Lasers and Electro-Optics Society (LEOS) 1995
    Country/TerritoryUnited States
    CitySan Francisco
    Period30/10/9531/10/95

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