A Study of LPCVD of Germanium-Silicon Alloys

Alexeij Y. Kovalgin, J. Holleman

    Research output: Book/ReportReportProfessional

    Original languageUndefined
    Place of PublicationUniversity of Twente
    PublisherGeen opgaven
    Number of pages119
    Publication statusPublished - 1998

    Keywords

    • METIS-112678

    Cite this

    Kovalgin, A. Y., & Holleman, J. (1998). A Study of LPCVD of Germanium-Silicon Alloys. University of Twente: Geen opgaven.