A Study of LPCVD of Germanium-Silicon Alloys

Alexeij Y. Kovalgin, J. Holleman

    Research output: Book/ReportReportProfessional

    Original languageUndefined
    Place of PublicationUniversity of Twente
    PublisherGeen opgaven
    Number of pages119
    Publication statusPublished - 1998

    Keywords

    • METIS-112678

    Cite this

    Kovalgin, A. Y., & Holleman, J. (1998). A Study of LPCVD of Germanium-Silicon Alloys. University of Twente: Geen opgaven.
    Kovalgin, Alexeij Y. ; Holleman, J. / A Study of LPCVD of Germanium-Silicon Alloys. University of Twente : Geen opgaven, 1998. 119 p.
    @book{a9605a99f82b4ccda579c5227fc8bef0,
    title = "A Study of LPCVD of Germanium-Silicon Alloys",
    keywords = "METIS-112678",
    author = "Kovalgin, {Alexeij Y.} and J. Holleman",
    note = "Final report to Philips 05-11-1998",
    year = "1998",
    language = "Undefined",
    publisher = "Geen opgaven",

    }

    Kovalgin, AY & Holleman, J 1998, A Study of LPCVD of Germanium-Silicon Alloys. Geen opgaven, University of Twente.

    A Study of LPCVD of Germanium-Silicon Alloys. / Kovalgin, Alexeij Y.; Holleman, J.

    University of Twente : Geen opgaven, 1998. 119 p.

    Research output: Book/ReportReportProfessional

    TY - BOOK

    T1 - A Study of LPCVD of Germanium-Silicon Alloys

    AU - Kovalgin, Alexeij Y.

    AU - Holleman, J.

    N1 - Final report to Philips 05-11-1998

    PY - 1998

    Y1 - 1998

    KW - METIS-112678

    M3 - Report

    BT - A Study of LPCVD of Germanium-Silicon Alloys

    PB - Geen opgaven

    CY - University of Twente

    ER -

    Kovalgin AY, Holleman J. A Study of LPCVD of Germanium-Silicon Alloys. University of Twente: Geen opgaven, 1998. 119 p.