| Original language | English |
|---|---|
| Place of Publication | Enschede |
| Publisher | University of Twente |
| Number of pages | 119 |
| Publication status | Published - 1998 |
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A Study of LPCVD of Germanium-Silicon Alloys
- Al.Y. Kovalgin
- , J. Holleman
Research output: Book/Report › Report › Professional