A study of measurement system noise for sensitive soft breakdown triggering

Jurriaan Schmitz, Hans P. Tuinhout

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Abstract

This work discusses a simple and effective method to determine the short-term repeatability of current measurements in a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection.

Original languageEnglish
Title of host publicationICMTS 2001
Subtitle of host publicationproceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages99-102
Number of pages4
ISBN (Print)0-7803-6511-9
DOIs
Publication statusPublished - 2001
Externally publishedYes
Event14th International Conference on Microelectronic Test Structures, ICMTS 2001 - International Conference Center Kobe, Kobe, Japan
Duration: 19 Mar 200122 Mar 2001
Conference number: 14

Conference

Conference14th International Conference on Microelectronic Test Structures, ICMTS 2001
Abbreviated titleICMTS
CountryJapan
CityKobe
Period19/03/0122/03/01

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Electric current measurement
Capacitors
Electric potential

Cite this

Schmitz, J., & Tuinhout, H. P. (2001). A study of measurement system noise for sensitive soft breakdown triggering. In ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan (pp. 99-102). Piscataway, NJ: IEEE. https://doi.org/10.1109/ICMTS.2001.928645
Schmitz, Jurriaan ; Tuinhout, Hans P. / A study of measurement system noise for sensitive soft breakdown triggering. ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan. Piscataway, NJ : IEEE, 2001. pp. 99-102
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Schmitz, J & Tuinhout, HP 2001, A study of measurement system noise for sensitive soft breakdown triggering. in ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan. IEEE, Piscataway, NJ, pp. 99-102, 14th International Conference on Microelectronic Test Structures, ICMTS 2001, Kobe, Japan, 19/03/01. https://doi.org/10.1109/ICMTS.2001.928645

A study of measurement system noise for sensitive soft breakdown triggering. / Schmitz, Jurriaan; Tuinhout, Hans P.

ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan. Piscataway, NJ : IEEE, 2001. p. 99-102.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - This work discusses a simple and effective method to determine the short-term repeatability of current measurements in a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection.

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Schmitz J, Tuinhout HP. A study of measurement system noise for sensitive soft breakdown triggering. In ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan. Piscataway, NJ: IEEE. 2001. p. 99-102 https://doi.org/10.1109/ICMTS.2001.928645