Abstract
This work discusses a simple and effective method to determine the short-term repeatability of current measurements in a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection.
Original language | English |
---|---|
Title of host publication | ICMTS 2001 |
Subtitle of host publication | proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 99-102 |
Number of pages | 4 |
ISBN (Print) | 0-7803-6511-9 |
DOIs | |
Publication status | Published - 2001 |
Externally published | Yes |
Event | 14th International Conference on Microelectronic Test Structures, ICMTS 2001 - International Conference Center Kobe, Kobe, Japan Duration: 19 Mar 2001 → 22 Mar 2001 Conference number: 14 |
Conference
Conference | 14th International Conference on Microelectronic Test Structures, ICMTS 2001 |
---|---|
Abbreviated title | ICMTS |
Country/Territory | Japan |
City | Kobe |
Period | 19/03/01 → 22/03/01 |