A study of measurement system noise for sensitive soft breakdown triggering

Jurriaan Schmitz; Hans P. Tuinhout

doi:10.1109/ICMTS.2001.928645

A study of measurement system noise for sensitive soft breakdown triggering

Jurriaan Schmitz^*, Hans P. Tuinhout

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

24 Downloads (Pure)

Abstract

This work discusses a simple and effective method to determine the short-term repeatability of current measurements in a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection.

Original language	English
Title of host publication	ICMTS 2001
Subtitle of host publication	proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	99-102
Number of pages	4
ISBN (Print)	0-7803-6511-9
DOIs	https://doi.org/10.1109/ICMTS.2001.928645
Publication status	Published - 2001
Externally published	Yes
Event	14th International Conference on Microelectronic Test Structures, ICMTS 2001 - International Conference Center Kobe, Kobe, Japan Duration: 19 Mar 2001 → 22 Mar 2001 Conference number: 14

Conference

Conference	14th International Conference on Microelectronic Test Structures, ICMTS 2001
Abbreviated title	ICMTS
Country/Territory	Japan
City	Kobe
Period	19/03/01 → 22/03/01

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10.1109/ICMTS.2001.928645

A study of measurement system noise for sensitive soft breakdown triggeringSubmitted version, 330 KBLicence: Unspecified

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@inproceedings{ca4ca15fb8a94b059876ac8442ee77b0,

title = "A study of measurement system noise for sensitive soft breakdown triggering",

abstract = "This work discusses a simple and effective method to determine the short-term repeatability of current measurements in a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection.",

author = "Jurriaan Schmitz and Tuinhout, {Hans P.}",

year = "2001",

doi = "10.1109/ICMTS.2001.928645",

language = "English",

isbn = "0-7803-6511-9",

pages = "99--102",

booktitle = "ICMTS 2001",

publisher = "IEEE",

address = "United States",

note = "14th International Conference on Microelectronic Test Structures, ICMTS 2001, ICMTS ; Conference date: 19-03-2001 Through 22-03-2001",

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Schmitz, J & Tuinhout, HP 2001, A study of measurement system noise for sensitive soft breakdown triggering. in ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan. IEEE, Piscataway, NJ, pp. 99-102, 14th International Conference on Microelectronic Test Structures, ICMTS 2001, Kobe, Japan, 19/03/01. https://doi.org/10.1109/ICMTS.2001.928645

A study of measurement system noise for sensitive soft breakdown triggering. / Schmitz, Jurriaan; Tuinhout, Hans P.
ICMTS 2001: proceedings of the 2001 International Conference on Microelectronic Test Structures : March 19-22, 2001, Kobe, Japan. Piscataway, NJ: IEEE, 2001. p. 99-102.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A study of measurement system noise for sensitive soft breakdown triggering

AU - Schmitz, Jurriaan

AU - Tuinhout, Hans P.

N1 - Conference code: 14

PY - 2001

Y1 - 2001

N2 - This work discusses a simple and effective method to determine the short-term repeatability of current measurements in a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection.

AB - This work discusses a simple and effective method to determine the short-term repeatability of current measurements in a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection.

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U2 - 10.1109/ICMTS.2001.928645

DO - 10.1109/ICMTS.2001.928645

M3 - Conference contribution

AN - SCOPUS:0034867090

SN - 0-7803-6511-9

SP - 99

EP - 102

BT - ICMTS 2001

PB - IEEE

CY - Piscataway, NJ

T2 - 14th International Conference on Microelectronic Test Structures, ICMTS 2001

Y2 - 19 March 2001 through 22 March 2001

ER -

A study of measurement system noise for sensitive soft breakdown triggering

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