A study of morphology and texture of LPCVD germanium-silicon films

A. Kovalgin, J. Holleman

    Research output: Contribution to journalConference articleAcademicpeer-review

    Fingerprint

    Dive into the research topics of 'A study of morphology and texture of LPCVD germanium-silicon films'. Together they form a unique fingerprint.

    Physics & Astronomy