A study of the electron quenching of excimers in a KrF* laser excited by a coaxial electron beam

P.J.M. Peters, Hubertus M.J. Bastiaens, W.J. Witteman, T. Gerber

Research output: Contribution to journalArticleAcademic

15 Citations (Scopus)
53 Downloads (Pure)

Abstract

Measurements of the output energy, the optical pulse length and the build-up time of the laser pulse, obtained with a coaxially e-beam pumped KrF* laser, were performed varying the total gas fill pressure, the F2 content and the e-beam current from 1–5 bar, 0.1–0.8% and 13.3–26.6 kA, respectively. The maximum specific extraction energy amounts to 64 J/l. The large range of measurements, especially at low F2 concentrations, reveals the necessity to extend the kinetics of the F2 chain in the usual computer model. With the introduction of electron quenching of KrF* and ArF* by dissociative attachment the predictions are also for low F2 concentration in agreement with experiments.
Original languageUndefined
Pages (from-to)253-261
JournalApplied physics B: Photophysics and laser chemistry
Volume43
Issue number4
DOIs
Publication statusPublished - 1987

Keywords

  • IR-85896

Cite this

@article{53477de5ce6c4266bdd959732ec861ba,
title = "A study of the electron quenching of excimers in a KrF* laser excited by a coaxial electron beam",
abstract = "Measurements of the output energy, the optical pulse length and the build-up time of the laser pulse, obtained with a coaxially e-beam pumped KrF* laser, were performed varying the total gas fill pressure, the F2 content and the e-beam current from 1–5 bar, 0.1–0.8{\%} and 13.3–26.6 kA, respectively. The maximum specific extraction energy amounts to 64 J/l. The large range of measurements, especially at low F2 concentrations, reveals the necessity to extend the kinetics of the F2 chain in the usual computer model. With the introduction of electron quenching of KrF* and ArF* by dissociative attachment the predictions are also for low F2 concentration in agreement with experiments.",
keywords = "IR-85896",
author = "P.J.M. Peters and Bastiaens, {Hubertus M.J.} and W.J. Witteman and T. Gerber",
year = "1987",
doi = "10.1007/BF00692496",
language = "Undefined",
volume = "43",
pages = "253--261",
journal = "Applied physics B: Lasers and optics",
issn = "0946-2171",
publisher = "Springer",
number = "4",

}

A study of the electron quenching of excimers in a KrF* laser excited by a coaxial electron beam. / Peters, P.J.M.; Bastiaens, Hubertus M.J.; Witteman, W.J.; Gerber, T.

In: Applied physics B: Photophysics and laser chemistry, Vol. 43, No. 4, 1987, p. 253-261.

Research output: Contribution to journalArticleAcademic

TY - JOUR

T1 - A study of the electron quenching of excimers in a KrF* laser excited by a coaxial electron beam

AU - Peters, P.J.M.

AU - Bastiaens, Hubertus M.J.

AU - Witteman, W.J.

AU - Gerber, T.

PY - 1987

Y1 - 1987

N2 - Measurements of the output energy, the optical pulse length and the build-up time of the laser pulse, obtained with a coaxially e-beam pumped KrF* laser, were performed varying the total gas fill pressure, the F2 content and the e-beam current from 1–5 bar, 0.1–0.8% and 13.3–26.6 kA, respectively. The maximum specific extraction energy amounts to 64 J/l. The large range of measurements, especially at low F2 concentrations, reveals the necessity to extend the kinetics of the F2 chain in the usual computer model. With the introduction of electron quenching of KrF* and ArF* by dissociative attachment the predictions are also for low F2 concentration in agreement with experiments.

AB - Measurements of the output energy, the optical pulse length and the build-up time of the laser pulse, obtained with a coaxially e-beam pumped KrF* laser, were performed varying the total gas fill pressure, the F2 content and the e-beam current from 1–5 bar, 0.1–0.8% and 13.3–26.6 kA, respectively. The maximum specific extraction energy amounts to 64 J/l. The large range of measurements, especially at low F2 concentrations, reveals the necessity to extend the kinetics of the F2 chain in the usual computer model. With the introduction of electron quenching of KrF* and ArF* by dissociative attachment the predictions are also for low F2 concentration in agreement with experiments.

KW - IR-85896

U2 - 10.1007/BF00692496

DO - 10.1007/BF00692496

M3 - Article

VL - 43

SP - 253

EP - 261

JO - Applied physics B: Lasers and optics

JF - Applied physics B: Lasers and optics

SN - 0946-2171

IS - 4

ER -