A study of the electron quenching of excimers in a KrF* laser excited by a coaxial electron beam

P.J.M. Peters, Hubertus M.J. Bastiaens, W.J. Witteman, T. Gerber

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Abstract

Measurements of the output energy, the optical pulse length and the build-up time of the laser pulse, obtained with a coaxially e-beam pumped KrF* laser, were performed varying the total gas fill pressure, the F2 content and the e-beam current from 1–5 bar, 0.1–0.8% and 13.3–26.6 kA, respectively. The maximum specific extraction energy amounts to 64 J/l. The large range of measurements, especially at low F2 concentrations, reveals the necessity to extend the kinetics of the F2 chain in the usual computer model. With the introduction of electron quenching of KrF* and ArF* by dissociative attachment the predictions are also for low F2 concentration in agreement with experiments.
Original languageUndefined
Pages (from-to)253-261
JournalApplied physics B: Photophysics and laser chemistry
Volume43
Issue number4
DOIs
Publication statusPublished - 1987

Keywords

  • IR-85896

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