A study on performance improvement of MEMS hair flow sensors by parametric amplification

H. Droogendijk; Gijsbertus J.M. Krijnen

A study on performance improvement of MEMS hair flow sensors by parametric amplification

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Abstract

Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. Improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise in sensitivity, dynamic range and selectivity.

Original language	Undefined
Title of host publication	Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010)
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	-
Number of pages	2
ISBN (Print)	978-90-73461-67-3
Publication status	Published - Nov 2010
Event	Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010 - Veldhoven, Netherlands Duration: 18 Nov 2010 → 19 Nov 2010

Publication series

Name
Publisher	Technology Foundation STW

Workshop

Workshop	Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010
Abbreviated title	SAFE
Country/Territory	Netherlands
City	Veldhoven
Period	18/11/10 → 19/11/10

Keywords

METIS-271143
EWI-18848
TST-Life like
IR-74755

Access to Document

droogendijk

Cite this

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title = "A study on performance improvement of MEMS hair flow sensors by parametric amplification",

abstract = "Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. Improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise in sensitivity, dynamic range and selectivity.",

keywords = "METIS-271143, EWI-18848, TST-Life like, IR-74755",

author = "H. Droogendijk and Krijnen, {Gijsbertus J.M.}",

year = "2010",

month = nov,

language = "Undefined",

isbn = "978-90-73461-67-3",

publisher = "STW",

pages = "--",

booktitle = "Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010)",

note = "Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010 ; Conference date: 18-11-2010 Through 19-11-2010",

}

Droogendijk, H & Krijnen, GJM 2010, A study on performance improvement of MEMS hair flow sensors by parametric amplification. in Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010). STW, Utrecht, The Netherlands, pp. -, Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010, Veldhoven, Netherlands, 18/11/10.

TY - GEN

T1 - A study on performance improvement of MEMS hair flow sensors by parametric amplification

AU - Droogendijk, H.

AU - Krijnen, Gijsbertus J.M.

PY - 2010/11

Y1 - 2010/11

N2 - Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. Improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise in sensitivity, dynamic range and selectivity.

AB - Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. Improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise in sensitivity, dynamic range and selectivity.

KW - METIS-271143

KW - EWI-18848

KW - TST-Life like

KW - IR-74755

M3 - Conference contribution

SN - 978-90-73461-67-3

SP - -

BT - Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010)

PB - STW

CY - Utrecht, The Netherlands

T2 - Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010

Y2 - 18 November 2010 through 19 November 2010

ER -