A study on performance improvement of MEMS hair flow sensors by parametric amplification

H. Droogendijk, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    20 Downloads (Pure)

    Abstract

    Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. Improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise in sensitivity, dynamic range and selectivity.
    Original languageUndefined
    Title of host publicationAnnual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE 2010)
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages-
    Number of pages2
    ISBN (Print)978-90-73461-67-3
    Publication statusPublished - Nov 2010
    EventAnnual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010 - Veldhoven, Netherlands
    Duration: 18 Nov 201019 Nov 2010

    Publication series

    Name
    PublisherTechnology Foundation STW

    Workshop

    WorkshopAnnual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period18/11/1019/11/10

    Keywords

    • METIS-271143
    • EWI-18848
    • TST-Life like
    • IR-74755

    Cite this