A survey on the reactive ion etching of silicon in microtechnology

Henri Jansen, Han Gardeniers, Jan Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995
Place of Publication	Copenhagen, Denmark
Publisher	MicroMechanics Europe
Pages	1-13
Number of pages	13
ISBN (Print)	8789935004
Publication status	Published - 3 Sept 1995
Event	6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark Duration: 3 Sept 1995 → 5 Sept 1995 Conference number: 6

Conference	6th Micromechanics Europe Workshop, MME 1995
Abbreviated title	MME
Country/Territory	Denmark
City	Copenhagen
Period	3/09/95 → 5/09/95

Access to Document

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title = "A survey on the reactive ion etching of silicon in microtechnology",

author = "Henri Jansen and Han Gardeniers and Jan Fluitman",

year = "1995",

month = sep,

day = "3",

language = "English",

isbn = "8789935004",

pages = "1--13",

booktitle = "Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995",

publisher = "MicroMechanics Europe",

note = "6th Micromechanics Europe Workshop, MME 1995, MME ; Conference date: 03-09-1995 Through 05-09-1995",

}

TY - GEN

T1 - A survey on the reactive ion etching of silicon in microtechnology

AU - Jansen, Henri

AU - Gardeniers, Han

AU - Fluitman, Jan

N1 - Conference code: 6

PY - 1995/9/3

Y1 - 1995/9/3

M3 - Conference contribution

SN - 8789935004

SP - 1

EP - 13

BT - Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995

PB - MicroMechanics Europe

CY - Copenhagen, Denmark

T2 - 6th Micromechanics Europe Workshop, MME 1995

Y2 - 3 September 1995 through 5 September 1995

ER -