A survey on the reactive ion etching of silicon in microtechnology

Henri Jansen, Han Gardeniers, Jan Fluitman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationSixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995
Place of PublicationCopenhagen, Denmark
PublisherMicroMechanics Europe
Pages1-13
Number of pages13
ISBN (Print)8789935004
Publication statusPublished - 3 Sep 1995
Event6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark
Duration: 3 Sep 19955 Sep 1995
Conference number: 6

Conference

Conference6th Micromechanics Europe Workshop, MME 1995
Abbreviated titleMME
CountryDenmark
CityCopenhagen
Period3/09/955/09/95

Cite this

Jansen, H., Gardeniers, H., & Fluitman, J. (1995). A survey on the reactive ion etching of silicon in microtechnology. In Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995 (pp. 1-13). Copenhagen, Denmark: MicroMechanics Europe.