A survey on the reactive ion etching of silicon in microtechnology

Henri Jansen, Han Gardeniers, Meint de Boer, Miko Elwenspoek, Jan Fluitman

Research output: Contribution to journal › Article › Academic › peer-review

368 Citations (Scopus)

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368 Citations
1 Conference contribution

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1995

A survey on the reactive ion etching of silicon in microtechnology
Jansen, H., Gardeniers, H. & Fluitman, J., 3 Sept 1995, Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995. Copenhagen, Denmark: MicroMechanics Europe, p. 1-13 13 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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