A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM

Constant A.J. Putman, Bart G. de Grooth, Niek F. van Hulst, Jan Greve

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Abstract

A shot-noise- and diffraction-limited Michelson interferometer and two optical beam deflection configurations are compared for application in an atomic force microscope. The results show that under optimal conditions the optical beam deflection method is just as sensitive as the interferometer. This remarkable result is explained by indicating the physical equivalence of both methods.
Original languageEnglish
Pages (from-to)1509-1513
Number of pages4
JournalUltramicroscopy
Volume42
Issue number44
DOIs
Publication statusPublished - 1992

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