A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM

Constant A.J. Putman; Bart G. de Grooth; Niek F. van Hulst; Jan Greve

doi:10.1016/0304-3991(92)90474-X

A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM

Constant A.J. Putman, Bart G. de Grooth, Niek F. van Hulst, Jan Greve

Optical Sciences

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

A shot-noise- and diffraction-limited Michelson interferometer and two optical beam deflection configurations are compared for application in an atomic force microscope. The results show that under optimal conditions the optical beam deflection method is just as sensitive as the interferometer. This remarkable result is explained by indicating the physical equivalence of both methods.

Original language	English
Pages (from-to)	1509-1513
Number of pages	4
Journal	Ultramicroscopy
Volume	42
Issue number	44
DOIs	https://doi.org/10.1016/0304-3991(92)90474-X
Publication status	Published - 1992

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Putman1992theoreticalFinal published version, 319 KB

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@article{33f8e8f901af44aa98dab6b863f2dbf9,

title = "A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM",

abstract = "A shot-noise- and diffraction-limited Michelson interferometer and two optical beam deflection configurations are compared for application in an atomic force microscope. The results show that under optimal conditions the optical beam deflection method is just as sensitive as the interferometer. This remarkable result is explained by indicating the physical equivalence of both methods.",

author = "Putman, {Constant A.J.} and {de Grooth}, {Bart G.} and {van Hulst}, {Niek F.} and Jan Greve",

year = "1992",

doi = "10.1016/0304-3991(92)90474-X",

language = "English",

volume = "42",

pages = "1509--1513",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier",

number = "44",

}

TY - JOUR

T1 - A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM

AU - Putman, Constant A.J.

AU - de Grooth, Bart G.

AU - van Hulst, Niek F.

AU - Greve, Jan

PY - 1992

Y1 - 1992

N2 - A shot-noise- and diffraction-limited Michelson interferometer and two optical beam deflection configurations are compared for application in an atomic force microscope. The results show that under optimal conditions the optical beam deflection method is just as sensitive as the interferometer. This remarkable result is explained by indicating the physical equivalence of both methods.

AB - A shot-noise- and diffraction-limited Michelson interferometer and two optical beam deflection configurations are compared for application in an atomic force microscope. The results show that under optimal conditions the optical beam deflection method is just as sensitive as the interferometer. This remarkable result is explained by indicating the physical equivalence of both methods.

U2 - 10.1016/0304-3991(92)90474-X

DO - 10.1016/0304-3991(92)90474-X

M3 - Article

SN - 0304-3991

VL - 42

SP - 1509

EP - 1513

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 44

ER -

A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM

Abstract

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