A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]

Bram Krijnen, B. Krijnen, Richard Hogervorst, Jan Willem Dijkstra, Johannes Bernardus Charles Engelen, L.A. Woldering, Dannis Michel Brouwer, Leon Abelmann, Herman Soemers

    Research output: Contribution to journalArticleAcademicpeer-review

    Abstract

    Accurate manipulation of small objects is becoming more and more important. Besides accurate manipulation, the demand for small manipulators is also increasing. Some examples are high-density data storage, (digital) light processing, accelerometers, rate sensors, and the use of cantilevers in atomic force microscopy. Another example where small and accurate manipulators are beneficial is inside an electron microscope, for sample as well as beam manipulation. This work presents the design, fabrication and experimental validation of a thermal displacement sensor for accurate measurement of the position of a MEMS stage. The sensor was integrated with the manipulation stage in a singlemask production process.
    Original languageEnglish
    Pages (from-to)5-11
    Number of pages7
    JournalMikroniek
    Volume51
    Issue number4
    Publication statusPublished - Jul 2011

    Keywords

    • TST-uSPAM: micro Scanning Probe Array Memory
    • TST-SMI: Formerly in EWI-SMI

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