Accurate manipulation of small objects is becoming more and more important. Besides accurate manipulation, the demand for small manipulators is also increasing. Some examples are high-density data storage, (digital) light processing, accelerometers, rate sensors, and the use of cantilevers in atomic force microscopy. Another example where small and accurate manipulators are beneficial is inside an electron microscope, for sample as well as beam manipulation. This work presents the design, fabrication and experimental validation of a thermal displacement sensor for accurate measurement of the position of a MEMS stage. The sensor was integrated with the manipulation stage in a singlemask production process.
|Number of pages||7|
|Publication status||Published - Jul 2011|
- TST-uSPAM: micro Scanning Probe Array Memory
- TST-SMI: Formerly in EWI-SMI