A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]

Bram Krijnen; Richard Hogervorst; Jan Willem van Dijk; Johan Engelen; Léon Woldering; Dannis Brouwer; Leon Abelmann; Herman Soemers

A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]

Bram Krijnen
, Richard Hogervorst
, Jan Willem van Dijk
, Johan Engelen
, Léon Woldering
, Dannis Brouwer
, Leon Abelmann
, Herman Soemers

Research output: Contribution to journal › Article › Academic › peer-review

35 Downloads (Pure)

Abstract

Accurate manipulation of small objects is becoming more and more important. Besides accurate manipulation, the demand for small manipulators is also increasing. Some examples are high-density data storage, (digital) light processing, accelerometers, rate sensors, and the use of cantilevers in atomic force microscopy. Another example where small and accurate manipulators are beneficial is inside an electron microscope, for sample as well as beam manipulation. This work presents the design, fabrication and experimental validation of a thermal displacement sensor for accurate measurement of the position of a MEMS stage. The sensor was integrated with the manipulation stage in a singlemask production process.

Original language	English
Pages (from-to)	5-11
Number of pages	7
Journal	Mikroniek
Volume	51
Issue number	4
Publication status	Published - Jul 2011

Keywords

TST-uSPAM: micro Scanning Probe Array Memory
TST-SMI: Formerly in EWI-SMI

Access to Document

ArticleFinal published version, 402 KB

Cite this

@article{2691dbff9f1748ef8c14dd4a66ecfaa8,

title = "A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]",

abstract = "Accurate manipulation of small objects is becoming more and more important. Besides accurate manipulation, the demand for small manipulators is also increasing. Some examples are high-density data storage, (digital) light processing, accelerometers, rate sensors, and the use of cantilevers in atomic force microscopy. Another example where small and accurate manipulators are beneficial is inside an electron microscope, for sample as well as beam manipulation. This work presents the design, fabrication and experimental validation of a thermal displacement sensor for accurate measurement of the position of a MEMS stage. The sensor was integrated with the manipulation stage in a singlemask production process.",

keywords = "TST-uSPAM: micro Scanning Probe Array Memory, TST-SMI: Formerly in EWI-SMI",

author = "Bram Krijnen and Richard Hogervorst and \{van Dijk\}, \{Jan Willem\} and Johan Engelen and L{\'e}on Woldering and Dannis Brouwer and Leon Abelmann and Herman Soemers",

year = "2011",

month = jul,

language = "English",

volume = "51",

pages = "5--11",

journal = "Mikroniek",

issn = "0026-3699",

publisher = "Nederlandse Vereniging voor Precisie Technologie",

number = "4",

}

TY - JOUR

T1 - A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]

AU - Krijnen, Bram

AU - Hogervorst, Richard

AU - van Dijk, Jan Willem

AU - Engelen, Johan

AU - Woldering, Léon

AU - Brouwer, Dannis

AU - Abelmann, Leon

AU - Soemers, Herman

PY - 2011/7

Y1 - 2011/7

N2 - Accurate manipulation of small objects is becoming more and more important. Besides accurate manipulation, the demand for small manipulators is also increasing. Some examples are high-density data storage, (digital) light processing, accelerometers, rate sensors, and the use of cantilevers in atomic force microscopy. Another example where small and accurate manipulators are beneficial is inside an electron microscope, for sample as well as beam manipulation. This work presents the design, fabrication and experimental validation of a thermal displacement sensor for accurate measurement of the position of a MEMS stage. The sensor was integrated with the manipulation stage in a singlemask production process.

AB - Accurate manipulation of small objects is becoming more and more important. Besides accurate manipulation, the demand for small manipulators is also increasing. Some examples are high-density data storage, (digital) light processing, accelerometers, rate sensors, and the use of cantilevers in atomic force microscopy. Another example where small and accurate manipulators are beneficial is inside an electron microscope, for sample as well as beam manipulation. This work presents the design, fabrication and experimental validation of a thermal displacement sensor for accurate measurement of the position of a MEMS stage. The sensor was integrated with the manipulation stage in a singlemask production process.

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - TST-SMI: Formerly in EWI-SMI

M3 - Article

SN - 0026-3699

VL - 51

SP - 5

EP - 11

JO - Mikroniek

JF - Mikroniek

IS - 4

ER -

A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]

Abstract

Keywords

Access to Document

Fingerprint

Cite this