A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

F.C.M. van de Pol; D.G.J. Wonnink; M. Elwenspoek; J.H.J. Fluitman

doi:10.1016/0250-6874(89)80073-3

A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

F.C.M. van de Pol, D.G.J. Wonnink, M. Elwenspoek, J.H.J. Fluitman

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Abstract

A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.

Original language	English
Pages (from-to)	139-143
Journal	Sensors and actuators
Volume	17
Issue number	1-2
DOIs	https://doi.org/10.1016/0250-6874(89)80073-3
Publication status	Published - 1989

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title = "A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices",

abstract = "A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.",

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AU - Wonnink, D.G.J.

AU - Elwenspoek, M.

AU - Fluitman, J.H.J.

PY - 1989

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AB - A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.

U2 - 10.1016/0250-6874(89)80073-3

DO - 10.1016/0250-6874(89)80073-3

M3 - Article

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VL - 17

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JO - Sensors and actuators

JF - Sensors and actuators

IS - 1-2

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A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

Abstract

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