TY - JOUR
T1 - A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices
AU - van de Pol, F.C.M.
AU - Wonnink, D.G.J.
AU - Elwenspoek, M.
AU - Fluitman, J.H.J.
PY - 1989
Y1 - 1989
N2 - A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.
AB - A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.
U2 - 10.1016/0250-6874(89)80073-3
DO - 10.1016/0250-6874(89)80073-3
M3 - Article
VL - 17
SP - 139
EP - 143
JO - Sensors and actuators
JF - Sensors and actuators
SN - 0250-6874
IS - 1-2
ER -