Abstract
A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.
Original language | English |
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Pages (from-to) | 139-143 |
Journal | Sensors and actuators |
Volume | 17 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 1989 |