A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

F.C.M. van de Pol, D.G.J. Wonnink, M. Elwenspoek, J.H.J. Fluitman

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    Abstract

    A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.
    Original languageEnglish
    Pages (from-to)139-143
    JournalSensors and actuators
    Volume17
    Issue number1-2
    DOIs
    Publication statusPublished - 1989

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